Direct simulation Monte Carlo (DSMC) of rarefied gas flow during etching of large diameter (300-mm) wafers

1996 ◽  
Vol 24 (1) ◽  
pp. 131-132 ◽  
Author(s):  
D.J. Economou ◽  
T.J. Bartel
Keyword(s):  
Monte Carlo ◽  
Gas Flow ◽  
Rarefied Gas ◽  
Large Diameter ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Rarefied Gas Flow ◽  
Simulation Monte Carlo

Direct Simulation Monte Carlo Method for the Simulation of Rarefied Gas Flow in Discrete Track Recording Head/Disk Interfaces

2008 ◽  
Vol 131 (1) ◽  
Author(s):  
Maik Duwensee ◽  
Frank E. Talke ◽  
Shoji Suzuki ◽  
Judy Lin ◽  
David Wachenschwanz
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Method ◽  
Gas Flow ◽  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Rarefied Gas Flow ◽  
Recording Head ◽  
Discrete Track ◽  
Simulation Monte Carlo

The direct simulation Monte Carlo method is used to study rarefied gas flow between an inclined plane slider bearing and a nanochannel representing one groove in discrete track recording head/disk interfaces. The forces acting on the slider are determined as a function of slider pitch angle, disk velocity, groove pitch, width, and groove depth. It is found that the influence of manufacturing tolerances on slider forces is smaller for deep and wide grooves than for the case of shallow and narrow grooves.

Direct Simulation Monte Carlo Method for the Simulation of Rarefied Gas Flow in Discrete Track Recording Head/Disk Interfaces

2007 ◽  
Author(s):  
Maik Duwensee ◽  
Shoji Suzuki ◽  
Judy Lin ◽  
David Wachenschwanz ◽  
Frank E. Talke
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Method ◽  
Gas Flow ◽  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Rarefied Gas Flow ◽  
Recording Head ◽  
Discrete Track ◽  
Simulation Monte Carlo

The direct simulation Monte Carlo method (DSMC) is used to study rarefied gas flow between an inclined plane slider bearing and a nano channel representing one groove in a discrete track recording head/disk interface. The forces acting on the slider are investigated as a function of slider pitch angle, disk velocity, track pitch, groove width, and groove depth. The influence of the absolute groove size on the slider forces is found to be small.

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