Solving the Boltzmann equation in a 2-D-configuration and 2-D-velocity space for capacitively coupled RF discharges
1995 ◽
Vol 23
(4)
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pp. 650-660
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Keyword(s):
2000 ◽
Vol 129
(1-3)
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pp. 91-99
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2014 ◽
Vol 258
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pp. 568-584
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1998 ◽
Vol 16
(1)
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pp. 294-299
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1957 ◽
Vol 3
(3)
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pp. 255-260
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Keyword(s):
1998 ◽
Vol 80
(1)
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pp. 65-68
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Keyword(s):
Keyword(s):