Vacuum arc ion sources for particle accelerators and ion implantation
1993 ◽
Vol 21
(5)
◽
pp. 537-546
◽
1998 ◽
Vol 69
(2)
◽
pp. 776-781
◽
Keyword(s):
1994 ◽
Vol 65
(10)
◽
pp. 3061-3081
◽
2005 ◽
Vol 33
(6)
◽
pp. 1931-1943
◽
2018 ◽
Vol 12
(4)
◽
pp. 705-709
1996 ◽
pp. 1098-1101
◽
Keyword(s):
1995 ◽
Vol 101
(4)
◽
pp. 394-399
◽
2014 ◽
Vol 27
◽
pp. 1460147
◽