RF discharge in the transverse magnetic field numerical model
1991 ◽
Vol 19
(2)
◽
pp. 197-203
◽
Keyword(s):
2008 ◽
Vol 17
(4)
◽
pp. 045005
◽
1995 ◽
Vol 23
(4)
◽
pp. 636-643
◽
Keyword(s):
2004 ◽
Vol 114
◽
pp. 371-372
◽
Keyword(s):
2016 ◽
Vol 7
(1)
◽
pp. 1-13
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2014 ◽
Vol 47
(11)
◽
pp. 115307
◽