A hybrid Monte Carlo/fluid model of RF plasmas in a SiH/sub 4//H/sub 2/ mixture
1991 ◽
Vol 19
(2)
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pp. 102-112
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2001 ◽
Vol 16
(7)
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pp. 750-755
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1999 ◽
Vol 54
(9)
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pp. 1335-1350
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Keyword(s):
2000 ◽
Vol 15
(8)
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pp. 895-905
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2009 ◽
Vol 64
(2)
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pp. 126-140
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2021 ◽
Vol 17
(2)
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pp. 1030-1044
Keyword(s):
2002 ◽
Vol 528
(3-4)
◽
pp. 301-305
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Keyword(s):