A hybrid Monte Carlo/fluid model of RF plasmas in a SiH/sub 4//H/sub 2/ mixture

1991 ◽  
Vol 19 (2) ◽  
pp. 102-112 ◽  
Author(s):  
N. Sato ◽  
H. Tagashira
1995 ◽  
Vol 78 (4) ◽  
pp. 2233-2241 ◽  
Author(s):  
A. Bogaerts ◽  
R. Gijbels ◽  
W. J. Goedheer

2021 ◽  
Vol 265 ◽  
pp. 107978
Author(s):  
Johann Ostmeyer ◽  
Evan Berkowitz ◽  
Thomas Luu ◽  
Marcus Petschlies ◽  
Ferenc Pittler

2002 ◽  
Vol 528 (3-4) ◽  
pp. 301-305 ◽  
Author(s):  
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Sergey Karamov

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