Are hydrogenated amorphous silicon arrays usable for tomographic imaging?

1994 ◽  
Vol 41 (4) ◽  
pp. 1516-1521 ◽  
Author(s):  
N.H. Clinthorne
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Tomographic Imaging ◽  
Silicon Arrays ◽  
Hydrogenated Amorphous

scholarly journals Erratum: “Demonstration of megavoltage and diagnostic x-ray imaging with hydrogenated amorphous silicon arrays” [Med. Phys. 19 , 1455-1466 (1992)]

1993 ◽  
Vol 20 (3) ◽  
pp. 825-825 ◽  
Author(s):  
Larry E. Antonuk ◽  
John Boudry ◽  
Weidong Huang ◽  
Daniel L. McShan ◽  
Edward J. Morton ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
X Ray ◽  
X Ray Imaging ◽  
Silicon Arrays ◽  
Hydrogenated Amorphous

Light-Response Characteristics of Amorphous Silicon Arrays for Megavoltage and Diagnostic Imaging

1991 ◽  
Vol 219 ◽  
Author(s):  
L. E. Antonuk ◽  
J. Yorkston ◽  
C. W. Kim ◽  
W. Huang ◽  
E. J. Morton ◽  
...  
Keyword(s):  
Diagnostic Imaging ◽  
Amorphous Silicon ◽  
Real Time ◽  
Hydrogenated Amorphous Silicon ◽  
Light Response ◽  
Imaging Arrays ◽  
Response Characteristics ◽  
Fluoroscopic Imaging ◽  
Silicon Arrays ◽  
Hydrogenated Amorphous

ABSTRACTLight-sensitive hydrogenated amorphous silicon pixel arrays are now under development for real-time megavoltage and diagnostic fluoroscopic imaging. Such applications place stringent demands upon a variety of array properties including the uniformity of the light-response function of the pixels. It is desirable that the design and fabrication of these imaging arrays maximize such uniformity. The implications of uniformity for imaging are reviewed, and data obtained from small arrays are presented and discussed.

scholarly journals Demonstration of megavoltage and diagnostic x-ray imaging with hydrogenated amorphous silicon arrays

1992 ◽  
Vol 19 (6) ◽  
pp. 1455-1466 ◽  
Author(s):  
Larry E. Antonuk ◽  
John Boudry ◽  
Weidong Huang ◽  
Daniel L. McShan ◽  
Edward J. Morton ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
X Ray ◽  
X Ray Imaging ◽  
Silicon Arrays ◽  
Hydrogenated Amorphous

BONDING IN HYDROGENATED AMORPHOUS SILICON

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-773-C4-777 ◽  
Author(s):  
H. R. Shanks ◽  
F. R. Jeffrey ◽  
M. E. Lowry
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Hydrogenated Amorphous

High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon

2003 ◽  
Vol 762 ◽  
Author(s):  
Guofu Hou ◽  
Xinhua Geng ◽  
Xiaodan Zhang ◽  
Ying Zhao ◽  
Junming Xue ◽  
...  
Keyword(s):  
Phase Transition ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
High Rate ◽  
Very High Frequency ◽  
High Quality ◽  
Working Pressure ◽  
Hydrogen Dilution ◽  
Hydrogenated Amorphous

AbstractHigh rate deposition of high quality and stable hydrogenated amorphous silicon (a-Si:H) films were performed near the threshold of amorphous to microcrystalline phase transition using a very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of hydrogen dilution on optic-electronic and structural properties of these films was investigated by Fourier-transform infrared (FTIR) spectroscopy, Raman scattering and constant photocurrent method (CPM). Experiment showed that although the phase transition was much influenced by hydrogen dilution, it also strongly depended on substrate temperature, working pressure and plasma power. With optimized condition high quality and high stable a-Si:H films, which exhibit σph/σd of 4.4×106 and deposition rate of 28.8Å/s, have been obtained.

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