Microlithography of high-temperature superconducting films: laser ablation vs. wet etching

P.H. Ballentine; A.M. Kadin; M.A. Fisher; D.S. Mallory; W.R. Donaldson

doi:10.1109/20.92445

Microlithography of high-temperature superconducting films: laser ablation vs. wet etching

IEEE Transactions on Magnetics ◽

10.1109/20.92445 ◽

1989 ◽

Vol 25 (2) ◽

pp. 950-953 ◽

Cited By ~ 14

Author(s):

P.H. Ballentine ◽

A.M. Kadin ◽

M.A. Fisher ◽

D.S. Mallory ◽

W.R. Donaldson

Keyword(s):

High Temperature ◽

Laser Ablation ◽

Superconducting Films ◽

Wet Etching ◽

High Temperature Superconducting

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A CRITICAL REVIEW OF LASER ABLATION-SYNTHESIS OF HIGH TEMPERATURE SUPERCONDUCTING FILMS

Materials and Manufacturing Processes ◽

10.1080/10426919108934734 ◽

1991 ◽

Vol 6 (1) ◽

pp. 33-52 ◽

Cited By ~ 10

Author(s):

O. Auciello

Keyword(s):

High Temperature ◽

Laser Ablation ◽

Critical Review ◽

Superconducting Films ◽

High Temperature Superconducting

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Angular dependence of critical currents of high temperature superconducting films in high magnetic fields prepared by metalorganic deposition

Cryogenics ◽

10.1016/0011-2275(92)90029-a ◽

1992 ◽

Vol 32 (11) ◽

pp. 1066-1070 ◽

Cited By ~ 11

Author(s):

D.H. Liebenberg ◽

P.C. McIntyre ◽

M.J. Clima ◽

T.L. Francavilla

Keyword(s):

High Temperature ◽

Magnetic Fields ◽

Angular Dependence ◽

Superconducting Films ◽

Critical Currents ◽

High Magnetic Fields ◽

High Temperature Superconducting ◽

Metalorganic Deposition

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Velocity distribution of Ba+ions in a plasma formed by laser ablation of a high-temperature superconducting target

Quantum Electronics ◽

10.1070/qe1995v025n11abeh000533 ◽

1995 ◽

Vol 25 (11) ◽

pp. 1060-1062 ◽

Cited By ~ 1

Author(s):

V N Burimov ◽

A N Zherikhin ◽

V L Popkov

Keyword(s):

High Temperature ◽

Laser Ablation ◽

Velocity Distribution ◽

High Temperature Superconducting

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Quasi-dynamical multi-channel coupler based on high temperature superconducting films

2012 IEEE 27th Convention of Electrical and Electronics Engineers in Israel ◽

10.1109/eeei.2012.6377102 ◽

2012 ◽

Cited By ~ 2

Author(s):

Eldad Holdengreber ◽

Moshe Mizrahi ◽

Eli Farber

Keyword(s):

High Temperature ◽

Superconducting Films ◽

High Temperature Superconducting

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Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films

Excimer Laser Technology ◽

10.1007/3-540-26667-4_26 ◽

2005 ◽

pp. 335-350 ◽

Cited By ~ 1

Author(s):

G. Reiße ◽

S. Weißmantel

Keyword(s):

High Temperature ◽

Boron Nitride ◽

Excimer Laser ◽

Superconducting Films ◽

High Temperature Superconducting

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On the thermal mechanism of microwave breakdown of high-temperature superconducting films

Technical Physics Letters ◽

10.1134/1.1262138 ◽

1998 ◽

Vol 24 (6) ◽

pp. 417-418

Author(s):

A. A. Pukhov

Keyword(s):

High Temperature ◽

Superconducting Films ◽

High Temperature Superconducting ◽

Thermal Mechanism ◽

Microwave Breakdown

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A review of high-temperature superconducting films on silicon

Superconductor Science and Technology ◽

10.1088/0953-2048/3/4/001 ◽

1990 ◽

Vol 3 (4) ◽

pp. 155-158 ◽

Cited By ~ 47

Author(s):

A Mogro-Campero

Keyword(s):

High Temperature ◽

Superconducting Films ◽

High Temperature Superconducting

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Behavior of T<inf>c</inf>of high temperature superconducting films and a determination of their parameters

IEEE Transactions on Magnetics ◽

10.1109/tmag.1985.1063728 ◽

1985 ◽

Vol 21 (2) ◽

pp. 514-516 ◽

Cited By ~ 5

Author(s):

V. Kresin

Keyword(s):

High Temperature ◽

Superconducting Films ◽

High Temperature Superconducting

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The use of high temperature superconducting films for the magnetic storage of information

IEEE Transactions on Magnetics ◽

10.1109/20.179403 ◽

1992 ◽

Vol 28 (5) ◽

pp. 2077-2080

Author(s):

J. Cairns ◽

Z. Zhang ◽

F.S. Barnes ◽

M.P. Dugas

Keyword(s):

High Temperature ◽

Superconducting Films ◽

Magnetic Storage ◽

High Temperature Superconducting

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MMW detection by superconducting films-applications of high temperature superconducting films

International Journal of Infrared and Millimeter Waves ◽

10.1007/bf01030098 ◽

1989 ◽

Vol 10 (12) ◽

pp. 1441-1450

Author(s):

J. -Y. Jeong ◽

K. Rose

Keyword(s):

High Temperature ◽

Superconducting Films ◽

High Temperature Superconducting

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