Dynamical mapping and end-point detection of photoresist development by using plastic-fiber-bundle probe array
1999 ◽
Vol 48
(6)
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pp. 1319-1323
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2001 ◽
Vol 40
(Part 1, No. 2A)
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pp. 644-648
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1992 ◽
Vol 191
(3-4)
◽
pp. 525-529
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1987 ◽
Vol 198
◽
pp. 325-328
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2000 ◽
Vol 48
(7)
◽
pp. 2812-2817
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