scholarly journals A capacitive pressure sensor interface using oversampling Δ-Σ demodulation techniques

1997 ◽  
Vol 46 (1) ◽  
pp. 3-7 ◽  
Author(s):  
M. Yamada ◽  
K. Watanabe
Keyword(s):  
Pressure Sensor ◽  
Capacitive Pressure Sensor ◽  
Sensor Interface

scholarly journals A Capacitive Pressure Sensor Interface IC with Wireless Power and Data Transfer

Micromachines ◽  
2020 ◽  
Vol 11 (10) ◽  
pp. 897
Author(s):  
Chaoping Zhang ◽  
Robert Gallichan ◽  
David Budgett ◽  
Daniel McCormick
Keyword(s):  
Pressure Sensor ◽  
Data Transfer ◽  
Capacitive Pressure Sensor ◽  
Wireless Power ◽  
Wireless Data ◽  
Sensor Interface ◽  
Low Dropout Regulators ◽  
Analog Front End ◽  
Serial Data ◽  
Wireless Power Supply

This paper presents a capacitive pressure sensor interface circuit design in 180 nm XH018 CMOS technology for an implantable capacitive pressure sensor, which has a wireless power supply and wireless data transfer function. It integrates full-bridge rectifiers, shorting control switches, low-dropout regulators, bandgap references, analog front end, single slope analog to digital converter (ADC), I2C, and an RC oscillator. The low-dropout regulators regulate the wireless power supply coming from the rectifier and provide a stable and accurate 1.8 V DC voltage to other blocks. The capacitance of the pressure sensor is sampled to a discrete voltage by the analog front end. The single slope ADC converts the discrete voltage into 11 bits of digital data, which is then converted into 1 kbps serial data out by the I2C block. The “1” of serial data is modulated to a 500 kHz digital signal that is used to control the shorting switch for wireless data transfer via inductive back scatter. This capacitive pressure sensor interface IC has a resolution of 0.98 mmHg (1.4 fF), average total power consumption of 7.8 mW, and ±3.2% accuracy at the worst case under a −20 to 80 °C temperature range, which improves to ±0.86% when operated between 20 and 60 °C.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Flexible M-Tooth Hybrid Micro-Structure Based Capacitive Pressure Sensor with High Sensitivity and Wide Sensing Range

2021 ◽  
pp. 1-1
Author(s):  
Valliammai Palaniappan ◽  
Masoud Panahi ◽  
Dinesh Maddipatla ◽  
Xingzhe Zhang ◽  
Simin Masihi ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Sensing Range
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