scholarly journals The accurate measurement of a micromechanical force using force-sensitive capacitances

1995 ◽  
Vol 44 (2) ◽  
pp. 188-191 ◽  
Author(s):  
M.R. Wolffenbuttel ◽  
P.P.L. Regtien
Keyword(s):  
Micromechanical Force

Biological Force Measurements Using Micromachined Cantilevers

1999 ◽  
Author(s):  
Y. Liang ◽  
J. N. Welch ◽  
R. G. Rudnitsky ◽  
T. W. Kenny
Keyword(s):  
Protein Folding ◽  
Receptor Binding ◽  
Biological Systems ◽  
Cellular Adhesion ◽  
Measuring Instruments ◽  
Mechanical Forces ◽  
Force Measurements ◽  
Work In Progress ◽  
Micromechanical Force

Abstract There are many interesting biological systems that utilize small mechanical forces to achieve functionality. Protein folding, ligand-receptor binding, cellular adhesion, and others all rely on picoNewton sized mechanical forces. In many of these examples, the fundamental character of the interaction remains controversial. In this paper, we describe work in progress to develop micromechanical force-measuring instruments suitable for measurements of these small biologically derived forces.

High pressure micromechanical force measurements of the effects of surface corrosion and salinity on CH4/C2H6 hydrate particle–surface interactions

2017 ◽  
Vol 19 (20) ◽  
pp. 13307-13315 ◽  
Author(s):  
Shenglong Wang ◽  
Sijia Hu ◽  
Erika P. Brown ◽  
Matthew A. Nakatsuka ◽  
Jiafei Zhao ◽  
...  
Keyword(s):  
High Pressure ◽  
Particle Surface ◽  
Surface Interactions ◽  
Particle Adhesion ◽  
Force Measurements ◽  
Surface Corrosion ◽  
Micromechanical Force

CH4/C2H6 hydrate particle adhesion/cohesion forces were directly measured with the presence of surface corrosion and salt.

Investigation of Different Piezoresistive Materials to be Integrated into Micromechanical Force Sensors Based on SU 8 Photoresist

2014 ◽  
Vol 613 ◽  
pp. 244-250 ◽  
Author(s):  
Alexa Oerke ◽  
Christina König ◽  
Stephanus Büttgenbach ◽  
Andreas Dietzel
Keyword(s):  
Three Dimensional ◽  
Scientific Work ◽  
Force Sensor ◽  
Gauge Factor ◽  
Force Sensors ◽  
Characteristic Factor ◽  
Force Sensitivity ◽  
Silicon Based ◽  
Micromechanical Force

The aim of this scientific work is to present different piezoresistive materials suitable to be integrated into micromechanical force sensors. As material for the mechanical structure of the sensors SU-8 has been chosen because it features favorable characteristics, such as flexible and simple fabrication of micro components through the use of standard UV lithography for forming three dimensional geometries such as cantilevers and membranes. In addition, on the basis of a significantly lower Young’s modulus compared to silicon, great opportunities to improve the force sensitivity of such sensors are offered by SU-8.However, SU-8 photoresist does not have piezoresistive properties, and therefore it has to be combined with an additional, beneficial piezoresistive material. A well-controlled and frequently used material for piezoresistive elements is doped silicon. This paper provides an overview of characteristics such as gauge factor and temperature coefficient of resistance (TCR) for a variety of commonly used piezoresistive materials, namely metals, silicon, conductive composite materials and diamond-like carbon. As a characteristic factor for the estimated sensitivity of the force sensor, the ratio of the gauge factor k to the Young´s modulus E of the structural material is presented for the different material combinations. A classification of conventional silicon based tactile force sensors is made to build a basis for comparison. Furthermore the suitability of different piezoresistive materials for the integration into an SU 8-based sensor is investigated.

Development of a high pressure micromechanical force apparatus

2014 ◽  
Vol 85 (9) ◽  
pp. 095120 ◽  
Author(s):  
Bo Ram Lee ◽  
Carolyn A. Koh ◽  
Amadeu K. Sum
Keyword(s):  
High Pressure ◽  
Micromechanical Force

scholarly journals Micromechanical Force Sensing with Applications to Biology

2002 ◽  
Author(s):  
T.W. Kenny ◽  
Y.-C. Liang ◽  
S.-W. Ueng ◽  
M. Bartsch ◽  
R. Rudnitsky
Keyword(s):  
Force Sensing ◽  
Micromechanical Force

Micromechanical force sensors based on SU-8 resist

2012 ◽  
Vol 18 (7-8) ◽  
pp. 1095-1101 ◽  
Author(s):  
A. Jordan ◽  
S. Büttgenbach
Keyword(s):  
Force Sensors ◽  
Micromechanical Force
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