A new implementation of the device line measurement technique for accurate microwave oscillator design

1994 ◽  
Vol 43 (2) ◽  
pp. 311-315 ◽  
Author(s):  
F.M. Ghannouchi ◽  
A.B. Kouki ◽  
F. Beauregard
Keyword(s):  
Measurement Technique ◽  
Microwave Oscillator ◽  
Line Measurement

An On-Line Measurement Technique for Machine Volumetric Error Compensation

1993 ◽  
Vol 115 (1) ◽  
pp. 85-92 ◽  
Author(s):  
J. Ni ◽  
S. M. Wu
Keyword(s):  
Measurement Technique ◽  
Error Compensation ◽  
Experimental Tests ◽  
Geometric Error ◽  
Degree Of Freedom ◽  
Volumetric Error ◽  
Measurement Systems ◽  
Line Measurement ◽  
Maximum Range ◽  
On Line

A hybrid on-line and off-line measurement technique is developed for machine volumetric error compensation based on a multiple-degree-of-freedom laser optical system. When implemented on a 3-axis machine up to 15 geometric error components can be measured simultaneously on-line and the remaining 6 components need to be calibrated off-line. Since the on-line measurement systems use different metrology bases, a modified volumetric error model is derived for a milling machine by considering the measurement features of the multiple-degree-of-freedom system. Through experimental tests, it was found that the discrepancy between the identified errors and the actual errors was less than 4 μm out of a maximum range of 20 μm.

Enabling Scatterometry as an In-Line Measurement Technique for 32 nm BEOL Application

2011 ◽  
Vol 24 (4) ◽  
pp. 499-512 ◽  
Author(s):  
M. Golam Faruk ◽  
Shahin Zangooie ◽  
Matthew Angyal ◽  
David K. Watts ◽  
Matthew Sendelbach ◽  
...  
Keyword(s):  
Measurement Technique ◽  
Line Measurement
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