Experimental evaluation of depth-dependent lateral standard deviation for various ions in a-Si from one-dimensional tilted implantation profiles
1999 ◽
Vol 46
(9)
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pp. 1824-1828
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1994 ◽
Vol 174
(5)
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pp. 677-694
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2020 ◽
Vol 203
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pp. 112239
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1984 ◽
Vol 50
(8)
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pp. 717-719
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2005 ◽
Vol 68
(2)
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pp. 375-383
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1981 ◽
Vol 67
(2)
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pp. 279-292
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