Accurate profile simulation parameters in BF/sub 2/ implants in pre-amorphized silicon
1989 ◽
Vol 36
(1)
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pp. 149-152
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Keyword(s):
2021 ◽
Vol 531
◽
pp. 167971
2021 ◽
Vol 1820
(1)
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pp. 012118
Keyword(s):
2015 ◽
Vol 719-720
◽
pp. 238-242
Keyword(s):