Structural Transformations and Defect Production in Ion Implanted Silicon: A Molecular Dynamics Simulation Study

1995 ◽  
Vol 74 (13) ◽  
pp. 2507-2510 ◽  
Author(s):  
T. Diaz de la Rubia ◽  
G. H. Gilmer
Sign in / Sign up

Export Citation Format

Share Document