One-dimensional solution for electron heating in an inductively coupled plasma discharge
1999 ◽
Vol 114
(1)
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pp. 60-64
◽
Keyword(s):
Keyword(s):
Keyword(s):
2008 ◽
Vol 8
(12)
◽
pp. 6376-6380
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1989 ◽
Vol 44
(7)
◽
pp. 657-666
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