Short- and intermediate-range structural correlations in amorphous silicon carbide: A molecular dynamics study

2004 ◽  
Vol 70 (4) ◽  
Author(s):  
José P. Rino ◽  
Ingvar Ebbsjö ◽  
Paulo S. Branicio ◽  
Rajiv K. Kalia ◽  
Aiichiro Nakano ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Amorphous Silicon Carbide ◽  
Intermediate Range

Molecular Dynamics Analysis of Structure and Intrinsic Stress in Amorphous Silicon Carbide Film with Deposition Process Parameters

2004 ◽  
Vol 449-452 ◽  
pp. 97-100
Author(s):  
Ju Young Kim ◽  
Baik Woo Lee ◽  
Ho Seok Nam ◽  
Dong Il Kwon
Keyword(s):  
Molecular Dynamics ◽  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Process Parameters ◽  
Deposition Process ◽  
Intrinsic Stress ◽  
Amorphous Silicon Carbide ◽  
Silicon Carbide Film ◽  
Dynamics Simulations ◽  
Sic Films

Amorphous silicon carbide (a-SiC) films were deposited using molecular dynamics simulations employing the Tersoff potential. The structure and intrinsic stress of a-SiC films changed dramatically with changes in such principal deposition process parameters as substrate temperature and incident energy. Changes in structure and intrinsic stress with deposition process parameters were analyzed.

A molecular dynamics study of nanoindentation of amorphous silicon carbide

2007 ◽  
Vol 102 (2) ◽  
pp. 023509 ◽  
Author(s):  
Izabela Szlufarska ◽  
Rajiv K. Kalia ◽  
Aiichiro Nakano ◽  
Priya Vashishta
Keyword(s):  
Molecular Dynamics ◽  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Amorphous Silicon Carbide

Structural relaxation of amorphous silicon carbide thin films in thermal annealing

2008 ◽  
Vol 516 (12) ◽  
pp. 3855-3861 ◽  
Author(s):  
Kun Xue ◽  
Li-Sha Niu ◽  
Hui-Ji Shi ◽  
Jiwen Liu
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Thermal Annealing ◽  
Structural Relaxation ◽  
Amorphous Silicon Carbide

Ion beam effects on the hydrogenated bonds of amorphous silicon carbide

2000 ◽  
Vol 166-167 ◽  
pp. 404-409 ◽  
Author(s):  
P. Musumeci ◽  
L. Calcagno ◽  
A. Makhtari ◽  
P. Baeri ◽  
G. Compagnini ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Ion Beam ◽  
Amorphous Silicon Carbide
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