Coalescence and impingement between islands in thin film growth: Behavior of the island density kinetics

2001 ◽  
Vol 64 (7) ◽  
Author(s):  
M. Fanfoni ◽  
M. Tomellini ◽  
M. Volpe
2019 ◽  
Vol 28 (8) ◽  
pp. 088101 ◽  
Author(s):  
Tian-Jiao Liu ◽  
Hua-Yan Xia ◽  
Biao Liu ◽  
Tim S Jones ◽  
Mei Fang ◽  
...  

2001 ◽  
Vol 78 (22) ◽  
pp. 3424-3426 ◽  
Author(s):  
M. Fanfoni ◽  
M. Tomellini ◽  
M. Volpe

2021 ◽  
Vol 118 (10) ◽  
pp. 102402
Author(s):  
Hiroaki Shishido ◽  
Akira Okumura ◽  
Tatsuya Saimyoji ◽  
Shota Nakamura ◽  
Shigeo Ohara ◽  
...  

2021 ◽  
Author(s):  
Kristina Ashurbekova ◽  
Karina Ashurbekova ◽  
Iva Saric ◽  
Evgeny Modin ◽  
Mladen Petravic ◽  
...  

We developed a thin film growth with a radical-initiated cross-linking of vinyl groups in a layer-by-layer manner via molecular layer deposition (MLD). The cross-linked film exhibited improved properties like 12% higher density and enhanced stability compared to the non-cross-linked film.


Author(s):  
Yoon Kyeung Lee ◽  
Chanyoung Yoo ◽  
Woohyun Kim ◽  
Jeongwoo Jeon ◽  
Cheol Seong Hwang

Atomic layer deposition (ALD) is a thin film growth technique that uses self-limiting, sequential reactions localized at the growing film surface. It guarantees exceptional conformality on high-aspect-ratio structures and controllability...


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