Density,sp3fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy

2000 ◽  
Vol 62 (16) ◽  
pp. 11089-11103 ◽  
Author(s):  
A. C. Ferrari ◽  
A. Libassi ◽  
B. K. Tanner ◽  
V. Stolojan ◽  
J. Yuan ◽  
...  
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Amorphous Carbon ◽  
Electron Energy Loss Spectroscopy ◽  
Carbon Films ◽  
Cross Sectional ◽  
Amorphous Carbon Films ◽  
X Ray ◽  
Electron Energy Loss ◽  
Sectional Structure

Electron energy loss study of diamond-like and amorphous carbon films

1993 ◽  
Vol 2 (5-7) ◽  
pp. 873-878 ◽  
Author(s):  
E.A. Maydell ◽  
E. Dunlop ◽  
D.J. Fabian ◽  
J. Haupt ◽  
W. Gissler
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Electron Energy Loss

scholarly journals Density and sp3 Content in Diamond-Like Carbon Films by X-ray Reflectivity and Electron Energy Loss Spectroscopy

1999 ◽  
Vol 593 ◽  
Author(s):  
A. Libassi ◽  
A. C. Ferrari ◽  
V. Stolojan ◽  
B. K. Tanner ◽  
J. Robertson ◽  
...  
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Mass Density ◽  
Grazing Angle ◽  
Carbon Films ◽  
X Ray ◽  
Tetrahedral Amorphous Carbon ◽  
Wave Resonance ◽  
Electron Energy Loss

ABSTRACTGrazing angle x-ray reflectivity (XRR) is used to study density, thickness, internal layering and roughness of a variety of carbon samples, with and without hydrogen and nitrogen. The bulk mass density of optimised tetrahedral amorphous carbon (ta-C) is 3.26 g/cm2, for which Electron Energy Loss Spectroscopy (EELS) found a sp3 fraction of 85%. Combining XRR and EELS we benchmark the dependence of sp3 fraction on density for hydrogen-free carbons. Hydrogenated ta-C (ta-C:H) deposited by electron cyclotron wave resonance (ECWR) reactor from acetylene gas, has a density of 2.35 g/cm3, 75% sp3 and ∼30% hydrogen. These data provide a similar validation for density and sp3 EELS data for hydrogenated DLCs. XRR can also reveal internal layering in films, and indeed less dense layers may be found at the surface or interface of ta-C films, but no such layers are found in ta-C:H films.

Signal/Noise Ratio and Elemental Detectivity by Eels

1982 ◽  
Vol 40 ◽  
pp. 488-489
Author(s):  
R. F. Egerton
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Elemental Analysis ◽  
Electron Energy Loss Spectroscopy ◽  
Emission Spectroscopy ◽  
X Ray ◽  
Signal Noise ◽  
Characteristic Signal ◽  
Noise Ratio ◽  
Electron Energy Loss

An important parameter governing the sensitivity and accuracy of elemental analysis by electron energy-loss spectroscopy (EELS) or by X-ray emission spectroscopy is the signal/noise ratio of the characteristic signal.

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