Electron-spin-echo envelope-modulation study of the distance between dangling bonds and hydrogen atoms in hydrogenated amorphous silicon

1993 ◽  
Vol 47 (12) ◽  
pp. 7013-7024 ◽  
Author(s):  
J. Isoya ◽  
S. Yamasaki ◽  
H. Okushi ◽  
A. Matsuda ◽  
K. Tanaka
1996 ◽  
Vol 420 ◽  
Author(s):  
S. Yamasaki ◽  
T. Umeda ◽  
J. Isoya ◽  
A. Matsuda ◽  
K. Tanaka

AbstractHydrogenated amorphous silicon (a-Si:H) samples containing 17O (3 x 1019 cm-3, nuclear spin, I, = 5/2) and 13C (3 - 4 x 1017cm-3, I = 1/2) isotope impurities were used in the detailed pulsed electron spin resonance (ESR) and pulsed electron-nuclear double resonance (ENDOR) measurements to obtain information on the role of O and C impurities in lightinduced metastable dangling bonds in a-Si:H. No hyperfine structure related to 17O and 13C atoms was observed in echo detected ESR, electron spin echo envelope modulation (ESEEM) of pulsed ESR as well as pulsed ENDOR (Davies and Mims sequences), which suggests that O and C impurities are not directly involved in the formation of light-induced dangling bonds.


1998 ◽  
Vol 507 ◽  
Author(s):  
A.J. Flewitt ◽  
W.I. Milne ◽  
J. Robertson ◽  
A.W. Stephenson ◽  
M.E. Welland

ABSTRACTThin films of hydrogenated amorphous silicon (a-Si:H) have been deposited by plasma-enhanced chemical vapour deposition (PECVD), and the resulting topography measured in-situ on a nanometre scale using a scanning tunnelling microscope (STM). An island structure is observed on the surface of device quality a-Si:H, which can be quantitatively analysed using a one dimensional Fourier transform of the topography. Results suggest that deposition is limited by the creation of dangling bonds on the a-Si:H surface and not by the surface transport of SiH 3 radicals at the deposition temperature (598 K). Island nucleation takes place through the abstraction of hydrogen atoms from the a-Si:H surface by plasma etching and the subsequent attachment of an SiH 3 radicals to the available sites. A thermally activated hydrogen effusion process around the edge of each island, where the step edge causes a high local hydrogen concentration, then creates further dangling bonds which allow the islands to grow. A simulation has been constructed, which confirms this two stage mechanism.


1991 ◽  
Vol 180 (3) ◽  
pp. 198-206 ◽  
Author(s):  
Herman Cho ◽  
Susanne Pfenninger ◽  
Jörg Forrer ◽  
Arthur Schweiger

1999 ◽  
Vol 121 (39) ◽  
pp. 9215-9218 ◽  
Author(s):  
Susan R. Morrissey ◽  
Thomas E. Horton ◽  
Christopher V. Grant ◽  
Charles G. Hoogstraten ◽  
R. David Britt ◽  
...  

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