Mitigating Thermoelastic Dissipation of Flexural Micromechanical Resonators by Decoupling Resonant Frequency from Thermal Relaxation Rate

Xin Zhou; Dingbang Xiao; Xuezhong Wu; Qingsong Li; Zhanqiang Hou; Kaixuan He; Yulie Wu

doi:10.1103/physrevapplied.8.064033

Mitigating Thermoelastic Dissipation of Flexural Micromechanical Resonators by Decoupling Resonant Frequency from Thermal Relaxation Rate

Physical Review Applied ◽

10.1103/physrevapplied.8.064033 ◽

2017 ◽

Vol 8 (6) ◽

Cited By ~ 7

Author(s):

Xin Zhou ◽

Dingbang Xiao ◽

Xuezhong Wu ◽

Qingsong Li ◽

Zhanqiang Hou ◽

...

Keyword(s):

Resonant Frequency ◽

Relaxation Rate ◽

Thermal Relaxation ◽

Micromechanical Resonators

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General Properties of Thermal-Relaxation Rate Equations

Physical Review B ◽

10.1103/physrevb.8.3487 ◽

1973 ◽

Vol 8 (7) ◽

pp. 3487-3487

Author(s):

M. W. P. Strandberg ◽

J. R. Shane

Keyword(s):

Relaxation Rate ◽

Thermal Relaxation ◽

Rate Equations ◽

General Properties

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General Properties of Thermal-Relaxation Rate Equations

Physical Review B ◽

10.1103/physrevb.7.4809 ◽

1973 ◽

Vol 7 (11) ◽

pp. 4809-4812 ◽

Cited By ~ 4

Author(s):

M. W. P. Strandberg ◽

J. R. Shane

Keyword(s):

Relaxation Rate ◽

Thermal Relaxation ◽

Rate Equations ◽

General Properties

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Vertical Transition in Transport and Mixing in Baroclinic Flows

Journal of the Atmospheric Sciences ◽

10.1175/2007jas2236.1 ◽

2008 ◽

Vol 65 (4) ◽

pp. 1137-1157 ◽

Cited By ~ 17

Author(s):

M. D. Greenslade ◽

P. H. Haynes

Keyword(s):

Relaxation Rate ◽

Channel Model ◽

Gaussian Function ◽

Plane Channel ◽

Lower Boundary ◽

Thermal Relaxation ◽

Vertical Shear ◽

Large Set ◽

Transport Barrier ◽

Transport And Mixing

Abstract Numerical simulations in multilevel baroclinic turbulence in a β-plane channel model are discussed, focusing on the transport and mixing behavior. The temperature field in the model is relaxed toward a field consistent with a broad zonal jet with vertical shear that is a Gaussian function of the cross-channel coordinate. The resulting statistical equilibrium flow includes an active baroclinic eddy field. The transport and mixing properties are analyzed by considering the fields of potential vorticity and a passive tracer (from which effective diffusivities/equivalent lengths are calculated). The upper part of the flow organizes itself in such a way that there is a transport barrier in the center of the channel, with eddy mixing regions on either side. In the lower part of the flow the eddy mixing occurs across a single broad region, with no central transport barrier. The transition between these two regimes takes place abruptly at a height zT. A large set of simulations is used to map out the variation of zT as a function of external parameters including β, the thermal relaxation rate κT, and the (lower boundary) frictional relaxation rate κM (applied in the lowest model layer only). The transition height zT is argued to be relevant to sharp vertical transitions in transport and mixing observed in atmospheric and oceanic flows.

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Investigation of MEMS Resonator Characteristics for Long-Term and Wide Temperature Variation Operation

Microelectromechanical Systems ◽

10.1115/imece2004-61727 ◽

2004 ◽

Cited By ~ 2

Author(s):

Bongsang Kim ◽

Rob N. Candler ◽

Matthew Hopcroft ◽

Manu Agarwal ◽

Woo-Tae Park ◽

...

Keyword(s):

Resonant Frequency ◽

Quality Factor ◽

Single Crystal Silicon ◽

Temperature Cycling ◽

Separate Experiment ◽

Total Change ◽

Crystal Silicon ◽

Micromechanical Resonators ◽

Mems Resonator

Two types of single-crystal silicon micromechanical resonators having resonant frequencies at 150 kHz and 130 kHz were tested under harsh environment to investigate stability. To observe long-term stability, the main characteristics, such as resonant frequency and quality factor were measured over 2,500 hrs continuously while maintaining constant environmental temperature at 25°C±0.1 °C. A separate experiment was also initiated to show stability during temperature cycling from −50°C to 80 °C. In both experiments, the total change in resonant frequency were less than 10 ppm and quality factor less than 10%, which demonstrates the stability of encapsulated micromechanical resonators upon exposure to harsh environments.

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