Performance of a silicon-on-insulator direct electron detector in a low-voltage transmission electron microscope

Microscopy ◽  
2020 ◽  
Author(s):  
Takafumi Ishida ◽  
Akira Shinozaki ◽  
Makoto Kuwahara ◽  
Toshinobu Miyoshi ◽  
Koh Saitoh ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
High Efficiency ◽  
Low Voltage ◽  
Direct Detection ◽  
High Sensitivity ◽  
Silicon On Insulator ◽  
Modulation Transfer ◽  
Electron Detector ◽  
Transmission Electron

Abstract The performance of a direct electron detector using silicon-on-insulator (SOI) technology in a low-voltage transmission electron microscope (LVTEM) is evaluated. The modulation transfer function and detective quantum efficiency of the detector are measured under backside illumination. The SOI-type detector is demonstrated to have high sensitivity and high efficiency for the direct detection of low-energy electrons. The detector is thus considered suitable for low-dose imaging in an LVTEM.

Fast Throughput Low Voltage Scanning Transmission Electron Microscope Imaging of Nano-Resolution Three Dimensional Tissue

2009 ◽  
Vol 15 (S2) ◽  
pp. 642-643
Author(s):  
M Bolorizadeh ◽  
HF Hess
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Low Voltage ◽  
Three Dimensional ◽  
Scanning Transmission Electron Microscope ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Microscope Imaging ◽  
Electron Microscope Imaging ◽  
Voltage Scanning

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Biological X-ray Microanalysis: The Past, Present Practices, and Future Prospects

2001 ◽  
Vol 7 (2) ◽  
pp. 211-219 ◽  
Author(s):  
Patrick Echlin
Keyword(s):  
Electron Microscope ◽  
Low Temperature ◽  
Transmission Electron Microscope ◽  
Low Voltage ◽  
High Energy ◽  
Scanning Transmission Electron Microscope ◽  
X Ray ◽  
Ambient Temperatures ◽  
Advantages And Disadvantages ◽  
Transmission Electron

Abstract A brief description is given of the events surrounding the development of biological X-ray microanalysis during the last 30 years, with particular emphasis on the contribution made by research workers in Cambridge, UK. There then follows a broad review of some applications of biological X-ray microanalysis. A more detailed consideration is given to the main thrust of current procedures and applications that are, for convenience, considered as four different kinds of samples. Thin frozen dried sections which are analyzed at ambient temperatures in a transmission electron microscope (TEM); semithin frozen dried sections which are analyzed at low temperature in a scanning transmission electron microscope (STEM); thick frozen hydrated sections which are analyzed at low temperature in a scanning electron microscope (SEM), and bulk samples which are analyzed at low temperature in the same type of instrument. A brief outline is given of the advantages and disadvantages of performing low-voltage, low-temperature X-ray microanalysis on frozen hydrated bulk biological material. The article concludes with a consideration of alternative approaches to in situ analysis using either high-energy beams or visible and near-visible photons.

Low Voltage Point Projection Microscopy and Time of Flight Stm - Two New Microscopies

1994 ◽  
Vol 332 ◽  
Author(s):  
J.C.H. Spence ◽  
W. Qian ◽  
W. Lo ◽  
S. Mo ◽  
U. Knipping ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
Low Voltage ◽  
Time Of Flight ◽  
Atomic Clusters ◽  
Electron Holography ◽  
Transmission Electron ◽  
Point Projection ◽  
Projection Field

ABSTRACTThe design of a low voltage point-projection field-emission transmission electron microscope is described and images showing 0.7nm resolution at 100 volts are given. A scheme for low voltage reflection electron holography from bulk samples in UHV is outlined. A new STM is described which allows atomic clusters to be transferred onto the tip, then introduced into a time-of-flight analyser for species identification.

In Situ Observation of Electron Beam-Induced Phase Transformation of CaCO3 to CaO via ELNES at Low Electron Beam Energies

2014 ◽  
Vol 20 (3) ◽  
pp. 715-722 ◽  
Author(s):  
Ute Golla-Schindler ◽  
Gerd Benner ◽  
Alexander Orchowski ◽  
Ute Kaiser
Keyword(s):  
Phase Transformation ◽  
Electron Beam ◽  
Electron Microscope ◽  
Bond Length ◽  
Transmission Electron Microscope ◽  
Low Voltage ◽  
In Situ Observation ◽  
Edge Structure ◽  
Transmission Electron

AbstractIt is demonstrated that energy-filtered transmission electron microscope enables following of in situ changes of the Ca-L2,3 edge which can originate from variations in both local symmetry and bond lengths. Low accelerating voltages of 20 and 40 kV slow down radiation damage effects and enable study of the start and finish of phase transformations. We observed electron beam-induced phase transformation of single crystalline calcite (CaCO3) to polycrystalline calcium oxide (CaO) which occurs in different stages. The coordination of Ca in calcite is close to an octahedral one streched along the <111> direction. Changes during phase transformation to an octahedral coordination of Ca in CaO go along with a bond length increase by 5 pm, where oxygen is preserved as a binding partner. Electron loss near-edge structure of the Ca-L2,3 edge show four separated peaks, which all shift toward lower energies during phase transformation at the same time the energy level splitting increases. We suggest that these changes can be mainly addressed to the change of the bond length on the order of picometers. An important pre-condition for such studies is stability of the energy drift in the range of meV over at least 1 h, which is achieved with the sub-Ångström low-voltage transmission electron microscope I prototype microscope.

Correction of Aberrations of a Transmission Electron Microscope

2001 ◽  
Vol 7 (S2) ◽  
pp. 900-901
Author(s):  
M. Haider
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
New Technologies ◽  
Low Voltage ◽  
Spherical Aberration ◽  
Computer Control ◽  
Chromatic Aberration ◽  
Primary Energy ◽  
Scanning Transmission Electron Microscope ◽  
Transmission Electron

One of the most striking problems in electron optics, the correction of resolution limiting aberrations by means of a corrector incorporated into the electron microscope column, has been solved during the last six years by demonstrating the improvement of resolution beyond the theoretical limit of the uncorrected Electron Microscope (EM). At first, in 1995 [1] with the correction of spherical and chromatic aberration of a dedicated Low Voltage Scanning Electron Microscope (LVSEM) and later, in 1997, with the correction of only spherical aberration of a commercially available 200 kV TEM [2]. The correction of spherical aberration of a dedicated Scanning Transmission Electron Microscope (STEM) at 100 keV primary energy has been demonstrated [3] and further improvements can be anticipated within the near future.These achievements could only be obtained due to the emergence of new computer technology and especially CCD-cameras in the case of TEM correctors. These two developments made it possible first to calculate the electron optical components more precisely and hence, to achieve a better understanding of the requirements on the hardware and second, to have a better computer control of the electron microscope and the corrector itself. The combination of these two new technologies made it possible to go towards an automatisation of the alignment. This simplification of the alignment of an even more complex system is achieved by means of a proper combination of image acquisition and dedicated software in order to analyze and measure the aberrations of an electron optical system on one side and on the other to have appropriate tools to compensate these aberrations by computer controlled power supplies [4,5].

scholarly journals Sub-Ångstrom Low-Voltage Performance of a Monochromated, Aberration-Corrected Transmission Electron Microscope

2010 ◽  
Vol 16 (4) ◽  
pp. 386-392 ◽  
Author(s):  
David C. Bell ◽  
Christopher J. Russo ◽  
Gerd Benner
Keyword(s):  
Electron Microscope ◽  
Electron Energy ◽  
Transmission Electron Microscope ◽  
Cross Sections ◽  
Materials Science ◽  
Low Voltage ◽  
Transmission Electron ◽  
Electron Microscopes ◽  
Voltage Performance ◽  
Aberration Corrected

AbstractLowering the electron energy in the transmission electron microscope allows for a significant improvement in contrast of light elements and reduces knock-on damage for most materials. If low-voltage electron microscopes are defined as those with accelerating voltages below 100 kV, the introduction of aberration correctors and monochromators to the electron microscope column enables Ångstrom-level resolution, which was previously reserved for higher voltage instruments. Decreasing electron energy has three important advantages: (1) knock-on damage is lower, which is critically important for sensitive materials such as graphene and carbon nanotubes; (2) cross sections for electron-energy-loss spectroscopy increase, improving signal-to-noise for chemical analysis; (3) elastic scattering cross sections increase, improving contrast in high-resolution, zero-loss images. The results presented indicate that decreasing the acceleration voltage from 200 kV to 80 kV in a monochromated, aberration-corrected microscope enhances the contrast while retaining sub-Ångstrom resolution. These improvements in low-voltage performance are expected to produce many new results and enable a wealth of new experiments in materials science.

scholarly journals New Low Voltage Scanning Transmission Electron Microscope Detector for Fastest Image Acquisition in BF, DF and HAADF

2013 ◽  
Vol 19 (S2) ◽  
pp. 1182-1183 ◽  
Author(s):  
R. Salzer ◽  
J. Ackermann ◽  
R. Arnold ◽  
S. Meyer ◽  
C. Kübler
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Low Voltage ◽  
Image Acquisition ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Voltage Scanning

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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