XPS Characterization on the Mn-Doped BST Thin Films Prepared by Sol-Gel Method

2002 ◽  
Vol 45 (1) ◽  
pp. 31-38 ◽  
Author(s):  
Jun-Bo Bao ◽  
Tian-Ling Ren ◽  
Jian-She Liu ◽  
Xiao-Ning Wang ◽  
Li-Tian Liu ◽  
...  
2008 ◽  
Vol 254 (22) ◽  
pp. 7459-7463 ◽  
Author(s):  
Yuhua Xiao ◽  
Shihui Ge ◽  
Li Xi ◽  
Yalu Zuo ◽  
Xueyun Zhou ◽  
...  

1995 ◽  
Vol 10 (1-4) ◽  
pp. 113-121 ◽  
Author(s):  
Miroslav Sedlar ◽  
Michael Sayer ◽  
Vasant Chivukula

2010 ◽  
Vol 105-106 ◽  
pp. 676-678
Author(s):  
Zong Hui Zhou ◽  
Jing Liu

A series of BST(Ba0.65Sr0.35TiO3) sol with different viscosity were prepared by using Ba(CH3COOH)2, Sr(CH3COOH)2 and Ti(OC4H9)4 as raw materials. The BST thin films were fabricated by sol-gel method and spin-coating process on Si(100) substrates. The effect of sol viscosity on crystallization, microstructure and dielectric properties of BST thin films were analyzed by using X-ray diffractometry, scanning electron microscopy and impedance phase analyzer. The results show that the BST films coated by sol with viscosity of 3.0cp and annealed at 750°C for 1h are basically non-crystalline. The crystallization degree increases with the increase of sol viscosity at the same annealing temperature. The ABO3 perovskite structure is formed when the sol viscosity increases to 3.5cp. With further increasing sol viscosity to 6.0cp, the crystal grains of the film grow well and range very compact, the surface become smooth, and the films have optimal dielectric properties.


2009 ◽  
Vol 105 (3) ◽  
pp. 034104 ◽  
Author(s):  
Xiaohua Sun ◽  
Ping Feng ◽  
Jun Zou ◽  
Min Wu ◽  
Xing-zhong Zhao

2011 ◽  
Vol 287-290 ◽  
pp. 2447-2451
Author(s):  
Xiao Hua Sun ◽  
Sheng Gang Zhou ◽  
Zhi Meng Luo ◽  
Shuang Hou ◽  
Tian You Peng ◽  
...  

Pb0.3Sr0.7TiO3 (PST) and 4.5 mol% Mn doped Pb0.3Sr0.7TiO3 (PSTMn) thin films as well as PST/PSTMn/PST/PSTMn/PST (ML-a) and PSTMn/PST/PSTMn/PST/PSTMn (ML-b) multilayered thin films have been fabricated on Pt/Ti/SiO2/Si substrate with sol–gel method. The structure and surface morphology of PST, PSTMn, ML-a and ML-b thin films were investigated by x-ray diffraction (XRD) and atom force microscopy (AFM). The dielectric measurements were conducted on metal-insulator-metal capacitors at the frequency from 100 Hz to 1M Hz and at room temperature. It was found that the surface microstructure of multilayered thin films is influenced by deposition sequence and the dielectric constant and tunability of two multilayered thin films lie between that of PST and PSTMn thin films. However, two multilayered thin films have higher the figure of merit (FOM) for lower dielectric loss. The FOM of PST and PSTMn single-component films as well as ML-a and Ml-b multilayered films are 14.2, 14.6, 16.3 and 20.2, respectively. Our results showed that multilayer structure can improve the comprehensive dielectric tunable performance of PST film.


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