A Semi-empirical Law for Sputtering in Plasma Devices
A general law is given for sputtering coefficients as a function of the energy of hydrogen and helium isotope ions incident on metallic and graphite walls and limiters. The average over a Maxwellian spectrum is performed analytically.
2006 ◽
Vol 15
(4)
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pp. 447
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2013 ◽
Vol 48
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pp. 192-200
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1977 ◽
Vol 10
(5)
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pp. 717-720
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