Wet-based digital etching on GaN and AlGaN

Applied Physics Letters ◽

10.1063/5.0074443 ◽

2022 ◽

Vol 120 (2) ◽

pp. 022101

Author(s):

Pao-Chuan Shih ◽

Zachary Engel ◽

Habib Ahmad ◽

William Alan Doolittle ◽

Tomás Palacios

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