scholarly journals High-performance and compact integrated photonics platform based on silicon rich nitride–lithium niobate on insulator

APL Photonics ◽  
2021 ◽  
Vol 6 (11) ◽  
pp. 116102
Author(s):  
Xingrui Huang ◽  
Yang Liu ◽  
Zhiyong Li ◽  
Zhongchao Fan ◽  
Weihua Han
Keyword(s):  
Lithium Niobate ◽  
High Performance ◽  
Integrated Photonics

Superconducting NbN thin films on various (X/Y/Z-cut) lithium niobate substrates

2021 ◽  
Author(s):  
Mengting Si ◽  
Wang Chengli ◽  
Can Yang ◽  
Wei Peng ◽  
Lixing You ◽  
...  
Keyword(s):  
Thin Films ◽  
Lithium Niobate ◽  
Thick Film ◽  
High Performance ◽  
Detection Efficiency ◽  
Single Photon ◽  
Integrated Photonics ◽  
Photon Detectors ◽  
Optical Elements ◽  
Fully Integrated

Abstract Lithium niobate (LN) exhibits outstanding properties in various application of photonics, electronics, and optoelectronics, showing potentials in integration. Due to the directional dependence of LN tensor properties, optical elements made up by LN favor the type of LN substrate. To introduce high-performance superconducting nanowire single-photon detectors to LN-integrated photonics chips, superconducting NbN thin films with thicknesses from 3 to 50 nm were deposited on X-cut, Y-cut, and Z-cut LN substrates using magnetron sputtering at room temperature. The different thickness dependencies of Tc, δTc, and residual resistance ratios are observed in NbN thin films on different LN substrates. NbN thin films on X-cut and Y-cut LN substrates are polycrystalline with a transition temperature (Tc) of ~6 K for a 6-nm-thick film. While NbN thin films are epitaxially textured on Z-cut LN substrates with Tc of 11.5 K for a 6-nm-thick film. NbN-SNSPD on X-cut LN substrates shows a weak saturation trend of its system detection efficiency; however, the performance of NbN-SNSPD on Z-cut LN substrates is limited. We evaluated the selection of cuts and concluded that X-cut and Y-cut LN are more suitable to be a platform of integrated LN photonic chips from the aspect of NbN-SNSPD. This study helps fabricate high-performance SNSPDs on fully integrated photonics chips on LN substrates.

High-Performance Integrated Photonics in Thin Film Lithium Niobate Platform

2019 ◽  
Author(s):  
Meisam Bahadori ◽  
Arunita Kar ◽  
Yansong Yang ◽  
Ali Lavasani ◽  
Lynford Goddard ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Integrated Photonics

scholarly journals In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor

2021 ◽  
Vol 8 ◽  
Author(s):  
Rui Ma ◽  
Weiguo Liu ◽  
Xueping Sun ◽  
Shun Zhou
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Electromechanical Coupling ◽  
Substrate Material ◽  
Electromechanical Coupling Coefficient ◽  
Bonding Layer ◽  
Saw Sensor ◽  
Rayleigh Mode

This paper studied the manufacturing process of Piezoelectric-on-Silicon (POS) substrate which integrates 128° Y–X Lithium niobate thin film and silicon wafer using Smart-Cut technology. The blistering and exfoliation processes of the He as-implanted LN crystal under different annealing temperatures are observed by the in-situ method. Unlike the conventional polishing process, the stripping mechanism of the Lithium niobate thin film is changed by controlling annealing temperature, which can improve the surface morphology of the peeling lithium niobate thin film. We prepared the 128° Y–X POS substrate with high single-crystal Lithium niobate thin film and surface roughness of 3.91 nm through Benzocyclobutene bonding. After simulating the surface acoustic wave (SAW) characteristics of the POS substrate, the results demonstrate that the Benzocyclobutene layer not only performs as a bonding layer but also can couple more vibrations into the LN thin film. The electromechanical coupling coefficient of the POS substrate is up to 7.59% in the Rayleigh mode when hLN/λ is 0.3 and hBCB/λ is 0.1. Therefore, as a high-performance substrate material, the POS substrate has proved to be an efficient method to miniaturize and integrate the SAW sensor.

scholarly journals Incorporation of erbium ions into thin-film lithium niobate integrated photonics

2020 ◽  
Vol 116 (15) ◽  
pp. 151103 ◽  
Author(s):  
Sihao Wang ◽  
Likai Yang ◽  
Risheng Cheng ◽  
Yuntao Xu ◽  
Mohan Shen ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Integrated Photonics ◽  
Erbium Ions

scholarly journals High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit s−1 and beyond

2019 ◽  
Vol 13 (5) ◽  
pp. 359-364 ◽  
Author(s):  
Mingbo He ◽  
Mengyue Xu ◽  
Yuxuan Ren ◽  
Jian Jian ◽  
Ziliang Ruan ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
High Performance ◽  
Hybrid Silicon

scholarly journals Integrated photonics on thin-film lithium niobate

2021 ◽  
Author(s):  
Di Zhu ◽  
Linbo Shao ◽  
Mengjie Yu ◽  
Rebecca Cheng ◽  
Boris Desiatov ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Integrated Photonics

scholarly journals High-performance coherent optical modulators based on thin-film lithium niobate platform

2020 ◽  
Vol 11 (1) ◽  
Author(s):  
Mengyue Xu ◽  
Mingbo He ◽  
Hongguang Zhang ◽  
Jian Jian ◽  
Ying Pan ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Optical Modulators
Sign in / Sign up

Export Citation Format

Share Document