Point defect formation near the epitaxial Ge(001) growth surface and the impact on phosphorus doping activation
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2008 ◽
Vol 354
(14)
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pp. 1509-1515
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1995 ◽
Vol 137
(1-4)
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pp. 267-271
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2019 ◽
Vol 946
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pp. 950-955
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2014 ◽
Vol 127
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pp. 416-426
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