scholarly journals Time-resolved evolution of plasma parameters in a plasma immersion ion implantation source

2021 ◽  
Vol 28 (12) ◽  
pp. 123523
Author(s):  
J. Moreno ◽  
A. Khodaee ◽  
D. Okerstrom ◽  
M. P. Bradley ◽  
L. Couëdel
Keyword(s):  
Ion Implantation ◽  
Plasma Parameters ◽  
Time Resolved ◽  
Plasma Immersion Ion Implantation

Plasma immersion ion implantation characteristics with q-nonextensive electron velocity distribution

2015 ◽  
Vol 81 (3) ◽  
Author(s):  
N. Navab Safa ◽  
H. Ghomi ◽  
A. R. Niknam
Keyword(s):  
Distribution Function ◽  
Ion Implantation ◽  
Fluid Model ◽  
Electron Distribution Function ◽  
Implantation Dose ◽  
Electron Velocity ◽  
Plasma Parameters ◽  
Electron Velocity Distribution ◽  
Implantation Process ◽  
Plasma Immersion Ion Implantation

The plasma immersion ion implantation process is investigated in the presence ofq–nonextensive electrons by using a one-dimensional fluid model. The effect of the nonextensivity parameter,q, on the plasma parameters and sheath dynamics during the implantation process is studied. The results show that the implantation dose can be enhanced in the presence of energetic electrons at the tail of the distribution function. Different parameters of plasma such as sheath thickness, ion velocity and ion density show more change at the larger values of theq–parameter. Furthermore, the results of simulation tend to what is predicted by the Maxwellian electron distribution function (q= 1).

TiN/ZrO2 multilayers synthesized on GCr15 bearing steel using plasma immersion ion implantation and deposition

2007 ◽  
Vol 201 (15) ◽  
pp. 6615-6618 ◽  
Author(s):  
Tao Sun ◽  
Langping Wang ◽  
Yonghao Yu ◽  
Yuhang Wang ◽  
Xiaofeng Wang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Bearing Steel ◽  
Gcr15 Bearing Steel ◽  
Plasma Immersion Ion Implantation

A hard-tube pulser of 60 kV, 10 A for experiment and modeling in plasma immersion ion implantation

2000 ◽  
Vol 28 (5) ◽  
pp. 1392-1396 ◽  
Author(s):  
J.O. Rossi ◽  
M. Ueda ◽  
J.J. Barroso ◽  
V.A. Spassov
Keyword(s):  
Ion Implantation ◽  
Plasma Immersion Ion Implantation

Enhancing the blood response and antibacterial adhesion of titanium surface through oxygen plasma immersion ion implantation treatment

2019 ◽  
Vol 365 ◽  
pp. 173-178 ◽  
Author(s):  
Duen-Kai Shiau ◽  
Chih-Hsiung Yang ◽  
Ying-Sui Sun ◽  
Mei-Fang Wu ◽  
Haobo Pan ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Oxygen Plasma ◽  
Titanium Surface ◽  
Plasma Immersion Ion Implantation
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