Surface chemistry models for GaAs epitaxial growth and hydride cracking using reacting flow simulations
Keyword(s):
1998 ◽
Vol 120
(1)
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pp. 60-68
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Keyword(s):
2013 ◽
2017 ◽
Vol 15
(1)
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pp. 1-17
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2011 ◽
Vol 35
(7)
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pp. 1317-1327
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