Development of a flexure-based nano-actuator for high-frequency high-resolution directional sensing with atomic force microscopy
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2013 ◽
Vol 19
(5)
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pp. 1358-1363
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2009 ◽
Vol 20
(26)
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pp. 260201-260201
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1997 ◽
Vol 3
(3)
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pp. 203-213
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