Low temperature carbon co-implantation in silicon: Defects suppression and diffusion modeling
2016 ◽
Vol 2016
◽
pp. 1-11
◽
Keyword(s):
2014 ◽
Vol 51
(10)
◽
pp. 1191-1204
◽
Keyword(s):
2018 ◽
Vol 50
(6)
◽
pp. 2568-2585
◽
Keyword(s):