scholarly journals A DMD based UV lithography method with improved dynamical modulation range for the fabrication of curved microstructures

AIP Advances ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 045008
Author(s):  
Zhimin Zhang ◽  
Qingwang Meng ◽  
Ningning Luo
Keyword(s):  
Uv Lithography

scholarly journals Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography

2021 ◽  
Vol 3 (8) ◽  
pp. 2236-2244
Author(s):  
Matthias Keil ◽  
Alexandre Emmanuel Wetzel ◽  
Kaiyu Wu ◽  
Elena Khomtchenko ◽  
Jitka Urbankova ◽  
...  
Keyword(s):  
Super Resolution ◽  
Large Area ◽  
Uv Lithography ◽  
Deep Uv

A novel super resolution deep UV lithography method is employed to fabricate large area plasmonic metasurfaces.

Fabrication of plasmonic waveguides by nanoimprint and UV lithography

2008 ◽  
Author(s):  
Rasmus B. Nielsen ◽  
Alexandra Boltasseva ◽  
Anders Kristensen ◽  
Sergey I. Bozhevolnyi ◽  
Valentyn S. Volkov ◽  
...  
Keyword(s):  
Plasmonic Waveguides ◽  
Uv Lithography

scholarly journals Three-dimensional organic microlasers with low lasing thresholds fabricated by multiphoton and UV lithography

2014 ◽  
Vol 22 (10) ◽  
pp. 12316 ◽  
Author(s):  
Vincent W. Chen ◽  
Nina Sobeshchuk ◽  
Clément Lafargue ◽  
Eric S. Mansfield ◽  
Jeannie Yom ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Uv Lithography

scholarly journals 193-nm deep-UV lithography system using a line-narrowed ArF excimer laser

1993 ◽  
Author(s):  
Bruce W. Smith ◽  
Malcolm C. Gower ◽  
Mark Westcott ◽  
Lynn F. Fuller
Keyword(s):  
Excimer Laser ◽  
Uv Lithography ◽  
Arf Excimer Laser ◽  
Deep Uv ◽  
193 Nm ◽  
Lithography System

scholarly journals Dual-band fiber-chip grating coupler in a 300 mm silicon-on-insulator platform and 193-nm deep-UV lithography

2020 ◽  
Author(s):  
David Gonzalez-Andrade ◽  
Diego Pérez Galacho ◽  
Miguel Montesinos Ballester ◽  
Xavier LE ROUX ◽  
Eric Cassan ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Dual Band ◽  
Grating Coupler ◽  
Uv Lithography ◽  
Deep Uv ◽  
193 Nm
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