Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems

2021 ◽  
Vol 92 (1) ◽  
pp. 013507
Author(s):  
Jongyoon Kim ◽  
Kang-Il Lee ◽  
Hyun-Young Jeong ◽  
Ji-Hoon Lee ◽  
Yong Sup Choi
Keyword(s):  
Optical Diagnostics ◽  
Transparent Film ◽  
Spectrum Monitoring ◽  
Roll To Roll ◽  
Optical Diagnostics Of Plasma

The Micro-Indentation Detection of Multilayer Structured Transparent Film Based on Dark Field Illumination

2012 ◽  
Vol 217-219 ◽  
pp. 1043-1048 ◽  
Author(s):  
Jian Kui Chen ◽  
Zhou Ping Yin ◽  
Yong An Huang ◽  
You Lun Xiong
Keyword(s):  
Position Control ◽  
Detection Method ◽  
Vision System ◽  
Dark Field ◽  
Transparent Film ◽  
Experiment Platform ◽  
Roll To Roll ◽  
Dark Field Illumination ◽  
Parallel Strip ◽  
Micro Indentation

It is difficult to keep the precise conveyance in film discontinuous winding system, while there are no etch or print marks on the transparent film. Based on dark field illumination theory, a micro-indentation detection method is proposed for multilayer structured transparent film roll-to-roll processing. Two parallel strip lights are involved in the vision system to illuminate the indentation at a low angle, which ensures that the distinct image of the cutting indentation can be obtained in reflection and diffuse homogeneous lights. The measurement of micro-indentations can be used to evaluate the film conveying positioning accuracy and calculate the compensation of film feeding position control. An experiment platform was established to show the efficiency and feasibility of proposed scheme. Experimental results showed that the micro-indentation detection method, based on dark field illumination, is successful to increase the feeding precision of multilayer structured transparent film discontinuous winding system.

Nano-sized Ag inserted into ITO films prepared by continuous roll-to-roll sputtering for high-performance, flexible, transparent film heaters

RSC Advances ◽  
2016 ◽  
Vol 6 (52) ◽  
pp. 46634-46642 ◽  
Author(s):  
Eun-Hye Ko ◽  
Hyo-Joong Kim ◽  
Sang-Jin Lee ◽  
Jae-Heung Lee ◽  
Han-Ki Kim
Keyword(s):  
High Performance ◽  
Pilot Scale ◽  
Transparent Film ◽  
Roll To Roll ◽  
Ito Films

We demonstrate high-performance, flexible, transparent film heaters fabricated on a conductive Ag layer inserted into ITO films prepared by pilot-scale roll-to-roll (RTR) sputtering.

The use of ?actinometer? gases in optical diagnostics of plasma etching mixtures: SF6-O2

1981 ◽  
Vol 1 (4) ◽  
pp. 365-375 ◽  
Author(s):  
Riccardo d'Agostino ◽  
Vincenzo Colaprico ◽  
Francesco Cramarossa
Keyword(s):  
Plasma Etching ◽  
Optical Diagnostics ◽  
Optical Diagnostics Of Plasma

Optical Diagnostics of Plasma and Particle in an Atmospheric Pressure Dusty Plasma

2002 ◽  
Vol 66 (1) ◽  
pp. 82-88 ◽  
Author(s):  
A A Samarian ◽  
O S Vaulina ◽  
A P Nefedov ◽  
O F Petrov ◽  
A I Denisenko
Keyword(s):  
Dusty Plasma ◽  
Atmospheric Pressure ◽  
Optical Diagnostics ◽  
Optical Diagnostics Of Plasma

Electrical and Optical Diagnostics of Plasma Jet Generated by Needle-plate Dielectric Barrier Discharge at Atmospheric Argon

2014 ◽  
Vol 35 (11) ◽  
pp. 1388-1393
Author(s):  
尹增谦 YIN Zeng-qian ◽  
沈崇丰 SHEN Chong-feng ◽  
王永杰 WANG Yong-jie ◽  
王慧娟 WANG Hui-juan
Keyword(s):  
Dielectric Barrier Discharge ◽  
Barrier Discharge ◽  
Plasma Jet ◽  
Optical Diagnostics ◽  
Dielectric Barrier ◽  
Atmospheric Argon ◽  
Optical Diagnostics Of Plasma
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