scholarly journals A study of the correlation between fine particle mass loading effect and frequency shift of a bare QCM

2020 ◽  
Author(s):  
Arif Budianto ◽  
Arinto Yudi Ponco Wardoyo ◽  
Masruroh ◽  
Hari Arief Dharmawan ◽  
Muhammad Nurhuda
Keyword(s):  
Frequency Shift ◽  
Fine Particle ◽  
Particle Mass ◽  
Mass Loading ◽  
Loading Effect

Investigation on Resonance Effects of Closely Resonating Nano-Pillars Attached to SAW Resonator

2011 ◽  
Vol 403-408 ◽  
pp. 1183-1187
Author(s):  
N. Ramakrishnan ◽  
Harshal B. Nemade ◽  
Roy Paily Palathinkal
Keyword(s):  
Acoustic Wave ◽  
Resonance Frequency ◽  
Frequency Shift ◽  
Fem Simulation ◽  
Mass Loading ◽  
Loading Effect ◽  
Resonance Effects ◽  
Additional Information ◽  
Resonance Frequency Shift ◽  
Small Change

Surface acoustic wave (SAW) sensors form an important class of micro sensors in the microelecto mechanical systems (MEMS) family. Mass loading effect of a sensing medium is one of the prime sensing principles in SAW sensors. Recently we reported mass loading effect of high aspect ratio nano-pillars attached to a SAW resonator. We observed increase in resonance frequency of the SAW resonator in addition to the general mass loading characteristics. We concluded that when the resonance frequency of the pillar is equal to the SAW resonator frequency, the resonance frequency shift caused by mass loading of pillar tends to a negligible value. When such resonating pillars are used as sensing medium in SAW sensors, even a very small change in the dimension of the pillar will offer significant resonance frequency shift. Accordingly, high sensitive SAW sensors can be developed. However in practice it’s quite difficult to manufacture nano-pillars with accurate dimensions such that they resonate with SAW resonator. There is more probability that the pillars may closely resonate with SAW device and offer mass loading. In the present work we have extended our earlier work and performed finite element method (FEM) simulation to study the insight physics of the closely resonating pillars and their effects on acoustic wave propagating on SAW substrate. In this paper we present the discussion on the resonance effects of typical closely resonating pillars on resonance frequency spectrum of the SAW resonator and observations in the pressure wave at the contact surface of the pillar and SAW resonator substrate. It is observed that when the nano-pillars closely resonate with SAW resonator, the pillar oscillations combine with waves propagating in the substrate and introduce beat frequencies. The results and discussion of this paper adds additional information in designing SAW based coupled resonating systems.

Particle Mass Loading Effect on a Two-Phase Turbulent Downward Jet Flow

1993 ◽  
Vol 10 (4) ◽  
pp. 173-181 ◽  
Author(s):  
Biing-Hwang Jou ◽  
Horn-Jiunn Sheen ◽  
Yuh-Tzyh Lee
Keyword(s):  
Jet Flow ◽  
Particle Mass ◽  
Mass Loading ◽  
Two Phase ◽  
Loading Effect

Fine Particle Mass Monitoring with Low-Cost Sensors: Corrections and Long-Term Performance Evaluation

2019 ◽  
Author(s):  
Carl Malings ◽  
Rebecca Tanzer ◽  
Aliaksei Hauryliuk ◽  
Provat K. Saha ◽  
Allen L. Robinson ◽  
...  
Keyword(s):  
Performance Evaluation ◽  
Fine Particle ◽  
Low Cost ◽  
Particle Mass ◽  
Long Term Performance ◽  
Term Performance

Updating the Conceptual Model for Fine Particle Mass Emissions from Combustion Systems Allen L. Robinson

2010 ◽  
Vol 60 (10) ◽  
pp. 1204-1222 ◽  
Author(s):  
Allen L. Robinson ◽  
Andrew P. Grieshop ◽  
Neil M. Donahue ◽  
Sherri W. Hunt
Keyword(s):  
Conceptual Model ◽  
Fine Particle ◽  
Particle Mass ◽  
Combustion Systems

Performance of a slit virtual impactor operated at high particle mass loading

2005 ◽  
Vol 36 (4) ◽  
pp. 541-547 ◽  
Author(s):  
Satyanarayanan Seshadri ◽  
Denis J. Phares ◽  
Taekyun Kim ◽  
Kenneth D. Kihm ◽  
Don D. Smith ◽  
...  
Keyword(s):  
Particle Mass ◽  
Mass Loading ◽  
High Particle ◽  
Virtual Impactor

Mass loading effect of shock accelerometers

2005 ◽  
Vol 117 (4) ◽  
pp. 2386-2386
Author(s):  
Lixue Wu ◽  
George S. K. Wong ◽  
Peter Hanes ◽  
Won‐Suk Ohm
Keyword(s):  
Mass Loading ◽  
Loading Effect

Improved Prediction of Electrodes’ Mass Loading Effect on MEMS FBAR Structure in Longitudinal Resonance

2008 ◽  
Author(s):  
Annie Ruimi ◽  
Yueming Liang ◽  
Robert M. McMeeking
Keyword(s):  
Finite Elements ◽  
Aluminum Nitride ◽  
Resonant Frequency ◽  
Layer Thickness ◽  
Piezoelectric Layer ◽  
Numerical Scheme ◽  
Three Dimensional ◽  
Mass Loading ◽  
Loading Effect ◽  
One Dimensional

In this paper, we derive an exact one-dimensional rule for predicting mass loading effect due to electrodes by analyzing a FBAR structure consisting of a piezoelectric layer and two electrodes in longitudinal resonance. We validate the numerical scheme using aluminum nitride as the piezoelectric material and gold and aluminum for the top and bottom electrodes respectively. Results are compared with three-dimensional finite elements simulations obtained earlier. It is seen that the new rule predicts higher values of the resonant frequency and constitutes an improvement over an elementary rule particularly for electrodes thicknesses greater than 20% of the piezoelectric layer thickness.

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