scholarly journals Thermal stability of α-Ga2O3 films grown on c-plane sapphire substrates via mist-CVD

AIP Advances ◽  
2020 ◽  
Vol 10 (11) ◽  
pp. 115013
Author(s):  
Riena Jinno ◽  
Kentaro Kaneko ◽  
Shizuo Fujita
1995 ◽  
Vol 403 ◽  
Author(s):  
T. Wagner ◽  
M. Lorenz ◽  
P. A. Langjahr ◽  
M. Ruhle

AbstractThin Nb films were deposited by MBE on (0001)α-Al2O3 in UHV. At a substrate temperature of 800°C, reflection high energy electron diffraction (RHEED) revealed that the film grew with the orientation relationship (planes of similar symmetry are parallel to each other): (0001)α-Al2O3 ‖ (111)Nb; [2110]α-Al2O3 ‖ [110]Nb. Investigations with conventional transmission electron. microscopy (CTEM) revealed that the film was not perfectly epitaxial after deposition. Small Nb grains with different orientations were embedded in the epitaxial Nb film. During annealing at temperatures well above the deposition temperature, secondary grain growth of the small embedded Nb grains occured, leading to a different epitaxial relationship between the Nb film and the sapphire: (0001)α-Al2O3 ‖ (110)Nb; [0110]α-Al2O3 ‖ [001]Nb.


Author(s):  
Shiro Fujishiro ◽  
Harold L. Gegel

Ordered-alpha titanium alloys having a DO19 type structure have good potential for high temperature (600°C) applications, due to the thermal stability of the ordered phase and the inherent resistance to recrystallization of these alloys. Five different Ti-Al-Ga alloys consisting of equal atomic percents of aluminum and gallium solute additions up to the stoichiometric composition, Ti3(Al, Ga), were used to study the growth kinetics of the ordered phase and the nature of its interface.The alloys were homogenized in the beta region in a vacuum of about 5×10-7 torr, furnace cooled; reheated in air to 50°C below the alpha transus for hot working. The alloys were subsequently acid cleaned, annealed in vacuo, and cold rolled to about. 050 inch prior to additional homogenization


Author(s):  
Yih-Cheng Shih ◽  
E. L. Wilkie

Tungsten silicides (WSix) have been successfully used as the gate materials in self-aligned GaAs metal-semiconductor-field- effect transistors (MESFET). Thermal stability of the WSix/GaAs Schottky contact is of major concern since the n+ implanted source/drain regions must be annealed at high temperatures (∼ 800°C). WSi0.6 was considered the best composition to achieve good device performance due to its low stress and excellent thermal stability of the WSix/GaAs interface. The film adhesion and the uniformity in barrier heights and ideality factors of the WSi0.6 films have been improved by depositing a thin layer of pure W as the first layer on GaAs prior to WSi0.6 deposition. Recently WSi0.1 has been used successfully as the gate material in 1x10 μm GaAs FET's on the GaAs substrates which were sputter-cleaned prior to deposition. These GaAs FET's exhibited uniform threshold voltages across a 51 mm wafer with good film adhesion after annealing at 800°C for 10 min.


1991 ◽  
Vol 1 (12) ◽  
pp. 1823-1836 ◽  
Author(s):  
M. Bessière ◽  
A. Quivy ◽  
S. Lefebvre ◽  
J. Devaud-Rzepski ◽  
Y. Calvayrac

1994 ◽  
Vol 4 (4) ◽  
pp. 653-657
Author(s):  
B. Bonzi ◽  
M. El Khomssi ◽  
H. Lanchon-Ducauquis

1998 ◽  
Vol 08 (PR2) ◽  
pp. Pr2-63-Pr2-66 ◽  
Author(s):  
R. Varga ◽  
P. Vojtaník ◽  
A. Lovas

2016 ◽  
Vol 38 (3) ◽  
pp. 211-217
Author(s):  
G.I. Khovanets’ ◽  
◽  
O.Y. Makido ◽  
V.V. Kochubey ◽  
Y.G. Medvedevskikh ◽  
...  

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