Surface roughness measurement of aluminium thin film by laser speckle method

2020 ◽  
Author(s):  
R. Balamurugan ◽  
K. Rathina ◽  
A. R. Arul ◽  
S. Inbakumar ◽  
R. G. Sethuraman
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Laser Speckle ◽  
Roughness Measurement ◽  
Surface Roughness Measurement

Comparison of Surface Roughness Measurement in Dichromatic Speckle Patterns with Autocorrelation Method

2011 ◽  
Vol 189-193 ◽  
pp. 680-683 ◽  
Author(s):  
Zong Heng Yuan ◽  
Yan Hua Zhang ◽  
Jian Wei Zhang ◽  
Ye Fan Ge
Keyword(s):  
Surface Roughness ◽  
Autocorrelation Function ◽  
Correlation Length ◽  
High Reliability ◽  
Laser Speckle ◽  
Roughness Measurement ◽  
Elongation Ratio ◽  
Surface Roughness Measurement ◽  
Speckle Patterns ◽  
Autocorrelation Method

Applying autocorrelation method to process laser speckle patterns, the relation between surface roughness and speckle elongation and correlation length of autocorrelation function can be obtained, and the measured surface roughness can be achieved based on this relation. One-dimension autocorrelation and two-dimension autocorrelation function are used, Moreover, surface roughness is evaluated by speckle elongation and correlation length of autocorrelation function. Aspect ratio of speckle granular represents speckle elongation ratio, which eliminates effects of speckle granular average size on measurement results compared to other methods using before. It has high reliability and efficiency in surface roughness measurement evaluation.

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