Cobalt doped ZnO films asantireflection coating application for solar cell

2020 ◽  
Author(s):  
M. Ismail. Fathima ◽  
K. S. Joseph Wilson ◽  
A. M. S. Arulanantham
Keyword(s):  
Solar Cell ◽  
Zno Films ◽  
Coating Application ◽  
Doped Zno

Effect of oxygen to argon flow ratio on the properties of Al-doped ZnO films for amorphous silicon thin film solar cell applications

2013 ◽  
Vol 529 ◽  
pp. 50-53 ◽  
Author(s):  
Yang-Shih Lin ◽  
Shui-Yang Lien ◽  
Yung-Chuan Huang ◽  
Chao-Chun Wang ◽  
Chueh-Yang Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cell ◽  
Amorphous Silicon ◽  
Thin Film Solar Cell ◽  
Zno Films ◽  
Flow Ratio ◽  
Silicon Thin Film ◽  
Argon Flow ◽  
Doped Zno ◽  
Effect Of Oxygen

Development of aluminum-doped ZnO films for a-Si:H/μc-Si:H solar cell applications

2013 ◽  
Vol 34 (6) ◽  
pp. 063004 ◽  
Author(s):  
Zhifang Lei ◽  
Guangyu Chen ◽  
Shibin Gu ◽  
Lingling Dai ◽  
Rong Yang ◽  
...  
Keyword(s):  
Solar Cell ◽  
Zno Films ◽  
Doped Zno

Workfunction of Al-Doped ZnO Films Deposited by Atomic Layer Deposition

2018 ◽  
Author(s):  
Peter George Gordon ◽  
Goran Bacic ◽  
Gregory P. Lopinski ◽  
Sean Thomas Barry
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Atomic Ratio ◽  
Aluminum Concentration ◽  
Zno Films ◽  
Transparent Conductor ◽  
Kelvin Probe ◽  
Layer Deposition ◽  
Earth Abundant ◽  
Doped Zno

Al-doped ZnO (AZO) is a promising earth-abundant alternative to Sn-doped In<sub>2</sub>O<sub>3</sub> (ITO) as an n-type transparent conductor for electronic and photovoltaic devices; AZO is also more straightforward to deposit by atomic layer deposition (ALD). The workfunction of this material is particularly important for the design of optoelectronic devices. We have deposited AZO films with resistivities as low as 1.1 x 10<sup>-3</sup> Ωcm by ALD using the industry-standard precursors trimethylaluminum (TMA), diethylzinc (DEZ), and water at 200<sup>◦</sup>C. These films were transparent and their elemental compositions showed reasonable agreement with the pulse program ratios. The workfunction of these films was measured using a scanning Kelvin Probe (sKP) to investigate the role of aluminum concentration. In addition, the workfunction of AZO films prepared by two different ALD recipes were compared: a “surface” recipe wherein the TMA was pulsed at the top of each repeating AZO stack, and a interlamellar recipe where the TMA pulse was introduced halfway through the stack. As aluminum doping increases, the surface recipe produces films with a consistently higher workfunction as compared to the interlamellar recipe. The resistivity of the surface recipe films show a minimum at a 1:16 Al:Zn atomic ratio and using an interlamellar recipe, minimum resistivity was seen at 1:19. The film thicknesses were characterized by ellipsometry, chemical composition by EDX, and resistivity by four-point probe.<br>

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

2013 ◽  
Vol 27 (10) ◽  
pp. 1112-1116 ◽  
Author(s):  
Ke-Wei SUN ◽  
Wan-Cheng ZHOU ◽  
Shan-Shan HUANG ◽  
Xiu-Feng TANG
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Sputtering Pressure
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