Segregation and activation of Sb implanted in Si by UV nanosecond-laser-anneal-induced non-equilibrium solidification

2020 ◽  
Vol 127 (13) ◽  
pp. 135701 ◽  
Author(s):  
Toshiyuki Tabata ◽  
Pierre-Edouard Raynal ◽  
Karim Huet ◽  
Jean-Luc Everaert
Keyword(s):  
Nanosecond Laser ◽  
Equilibrium Solidification ◽  
Laser Anneal ◽  
Non Equilibrium

Wrinkles Emerging in SiO2/Si Stack During UV Nanosecond Laser Anneal

2021 ◽  
Vol MA2021-01 (30) ◽  
pp. 1011-1011
Author(s):  
Imen Karmous ◽  
Fabien Roze ◽  
Pierre-Edouard Raynal ◽  
Karim Huet ◽  
Pablo Acosta Alba ◽  
...  
Keyword(s):  
Nanosecond Laser ◽  
Laser Anneal

Nanosecond Laser Anneal for BEOL Performance Boost in Advanced FinFETs

2018 ◽  
Author(s):  
Rinus T.P. Lee ◽  
N. Petrov ◽  
J. Kassim ◽  
M. Gribelyuk ◽  
J. Yang ◽  
...  
Keyword(s):  
Nanosecond Laser ◽  
Laser Anneal

scholarly journals The development of non-equilibrium solidification theories

2015 ◽  
Vol 45 (4) ◽  
pp. 358-376 ◽  
Author(s):  
WangWang KUANG ◽  
HaiFeng WANG ◽  
Feng LIU ◽  
Kang WANG
Keyword(s):  
Equilibrium Solidification ◽  
Non Equilibrium

scholarly journals Back-Diffusion In Crystal Growth. Eutectics

2015 ◽  
Vol 60 (3) ◽  
pp. 2403-2407 ◽  
Author(s):  
W. Wołczyński
Keyword(s):  
Differential Equation ◽  
Crystal Growth ◽  
Current Model ◽  
Solute Segregation ◽  
Solidification Path ◽  
Back Diffusion ◽  
Eutectic Alloys ◽  
Equilibrium Solidification ◽  
Solid Liquid ◽  
Non Equilibrium

Abstract Solute segregation/redistribution model for some eutectic alloys is presented. The differential equation for the solute micro-segregation during solidification accompanied by the back-diffusion is formulated. The solution to this equation results in the definitions of: solidification path, solid/liquid (s/l) interface path and redistribution path. An equation for the estimation of the amount of equilibrium and non-equilibrium precipitates is also delivered. It is proved that the current model is universal one. Thus, the model reduces perfectly, mathematically to both description of diffusion-less solidification and model of equilibrium solidification.

Investigation of the non-equilibrium solidification microstructure of a Mg–4Al–2RE (AE42) alloy

2016 ◽  
Vol 51 (13) ◽  
pp. 6287-6294 ◽  
Author(s):  
Weihua Sun ◽  
Xiaoying Shi ◽  
Emre Cinkilic ◽  
Alan A. Luo
Keyword(s):  
Solidification Microstructure ◽  
Equilibrium Solidification ◽  
Non Equilibrium
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