High‐accuracy post‐fabrication trimming of surface acoustic wave devices by laser photochemical processing

1988 ◽  
Vol 53 (8) ◽  
pp. 651-653 ◽  
Author(s):  
V. S. Dolat ◽  
J. H. C. Sedlacek ◽  
D. J. Ehrlich
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Accuracy ◽  
Photochemical Processing ◽  
Acoustic Wave Devices

scholarly journals Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

2017 ◽  
Vol 9 (28) ◽  
pp. 4112-4134 ◽  
Author(s):  
David B. Go ◽  
Massood Z. Atashbar ◽  
Zeinab Ramshani ◽  
Hsueh-Chia Chang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Chemical Sensing ◽  
Chemical Detection ◽  
Microfluidic Platforms ◽  
Acoustic Wave Sensors ◽  
Acoustic Wave Devices ◽  
Wave Sensors

Surface acoustic wave sensors and microfluidic platforms enable effective chemical detection and sample manipulation.

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