Production of a low‐pressure processing plasma with ion beam injection for thin‐film preparation

1988 ◽  
Vol 52 (23) ◽  
pp. 1956-1958 ◽  
Author(s):  
Hiroharu Fujita ◽  
Shinya Yagura
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Low Pressure ◽  
Beam Injection ◽  
Thin Film Preparation ◽  
Film Preparation

Observation of a magnetized low‐pressure rf plasma for thin‐film preparation

1991 ◽  
Vol 69 (1) ◽  
pp. 146-150 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Shinya Yagura ◽  
Hiroharu Fujita
Keyword(s):  
Thin Film ◽  
Low Pressure ◽  
Rf Plasma ◽  
Thin Film Preparation ◽  
Film Preparation

Ion-Beam-Induced CVD: An Alternative Method of Thin Film Preparation

1997 ◽  
Vol 3 (4) ◽  
pp. 219-226 ◽  
Author(s):  
Juan P. Espinós ◽  
Asunción Fernádez ◽  
Alfonso Caballero ◽  
Victor M. Jiménez ◽  
Juan C. Sánchez-López ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Alternative Method ◽  
Thin Film Preparation ◽  
Film Preparation

A thin film preparation using focused high power ion beam

2002 ◽  
Author(s):  
V.M. Bystritskii ◽  
S.N. Volkov ◽  
A.V. Mytnikov ◽  
A.A. Sinebryukhov ◽  
D.J. Rej
Keyword(s):  
Thin Film ◽  
High Power ◽  
Ion Beam ◽  
Thin Film Preparation ◽  
Film Preparation

Low pressure hand made PVD system for high crystalline metal thin film preparation in micro-nanometer scale

2016 ◽  
Author(s):  
Ahmad Rosikhin ◽  
Aulia Fikri Hidayat ◽  
Rinaldo Marimpul ◽  
Ibnu Syuhada ◽  
Toto Winata
Keyword(s):  
Thin Film ◽  
Low Pressure ◽  
Nanometer Scale ◽  
Metal Thin Film ◽  
Thin Film Preparation ◽  
Film Preparation ◽  
Crystalline Metal
Sign in / Sign up

Export Citation Format

Share Document