Experimental characterization of two‐dimensional dopant profiles in silicon using chemical staining
1988 ◽
Vol 192
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pp. 175-192
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2013 ◽
Vol 12
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pp. 1188-1191
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1996 ◽
Vol 14
(1)
◽
pp. 196
◽
2000 ◽
Vol 416
◽
pp. 151-172
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