Electron‐spin‐resonance study of defects in plasma‐enhanced chemical vapor deposited silicon nitride

D. Jousse; J. Kanicki; D. T. Krick; P. M. Lenahan

doi:10.1063/1.99438

Electron‐spin‐resonance study of defects in plasma‐enhanced chemical vapor deposited silicon nitride

Applied Physics Letters ◽

10.1063/1.99438 ◽

1988 ◽

Vol 52 (6) ◽

pp. 445-447 ◽

Cited By ~ 50

Author(s):

D. Jousse ◽

J. Kanicki ◽

D. T. Krick ◽

P. M. Lenahan

Keyword(s):

Electron Spin Resonance ◽

Silicon Nitride ◽

Electron Spin ◽

Chemical Vapor ◽

Electron Spin Resonance Study ◽

Spin Resonance ◽

Chemical Vapor Deposited ◽

Spin Resonance Study

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Electron-nuclear double-resonance and electron-spin-resonance study of silicon dangling-bond centers in silicon nitride

Physical Review B ◽

10.1103/physrevb.42.1773 ◽

1990 ◽

Vol 42 (3) ◽

pp. 1773-1780 ◽

Cited By ~ 75

Author(s):

William L. Warren ◽

P. M. Lenahan

Keyword(s):

Electron Spin Resonance ◽

Silicon Nitride ◽

Electron Spin ◽

Double Resonance ◽

Electron Spin Resonance Study ◽

Dangling Bond ◽

Electron Nuclear Double Resonance ◽

Spin Resonance ◽

Spin Resonance Study

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Electron spin resonance study of metal-nitride-silicon structures: Observation of Si dangling bonds with different configurations and trapping properties in silicon nitride

Applied Surface Science ◽

10.1016/0169-4332(89)90458-3 ◽

1989 ◽

Vol 39 (1-4) ◽

pp. 412-419 ◽

Cited By ~ 6

Author(s):

D. Jousse ◽

J. Kanicki ◽

J.H. Stathis

Keyword(s):

Electron Spin Resonance ◽

Silicon Nitride ◽

Electron Spin ◽

Electron Spin Resonance Study ◽

Dangling Bonds ◽

Metal Nitride ◽

Spin Resonance ◽

Silicon Structures ◽

Spin Resonance Study

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An electron spin resonance study on alkylperoxyl radical in thin-sliced renal tissues from ferric nitrilotriacetate-treated rats: The effect ofα-tocopherol feeding

Free Radical Research ◽

10.1080/10715760100300781 ◽

2001 ◽

Vol 35 (3) ◽

pp. 245-255 ◽

Cited By ~ 11

Author(s):

Shinya Toyokuni ◽

Toshiki Masumizu ◽

Munetaka Ozeki ◽

Shohei Kondo ◽

Makoto Hiroyasu ◽

...

Keyword(s):

Electron Spin Resonance ◽

Electron Spin ◽

Electron Spin Resonance Study ◽

Ferric Nitrilotriacetate ◽

Spin Resonance ◽

Spin Resonance Study

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Electron spin resonance study of the methyl- and cyclopropyltropenyl radicals and dianion radicals

Journal of the American Chemical Society ◽

10.1021/ja00754a032 ◽

1971 ◽

Vol 93 (25) ◽

pp. 6888-6890 ◽

Cited By ~ 9

Author(s):

Frank Farr ◽

Yong S. Rim ◽

Nathan L. Bauld

Keyword(s):

Electron Spin Resonance ◽

Electron Spin ◽

Electron Spin Resonance Study ◽

Spin Resonance ◽

Spin Resonance Study

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An electron spin resonance study of cholestane spin label in aqueous mixtures of biliary lipids

The Journal of Lipid Research ◽

10.1016/s0022-2275(20)41658-x ◽

1977 ◽

Vol 18 (4) ◽

pp. 417-422

Author(s):

R D Stevens

Keyword(s):

Electron Spin Resonance ◽

Electron Spin ◽

Spin Label ◽

Electron Spin Resonance Study ◽

Aqueous Mixtures ◽

Biliary Lipids ◽

Spin Resonance ◽

Spin Resonance Study ◽

Cholestane Spin Label

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ChemInform Abstract: UNSTABLE INTERMEDIATES. PART 194. ALKYL RADICAL-HALIDE ION ADDUCTS: AN ELECTRON SPIN RESONANCE STUDY OF THE RADIOLYSIS OF A RANGE OF ALKYL BROMIDES AND IODIDES

Chemischer Informationsdienst ◽

10.1002/chin.198147111 ◽

1981 ◽

Vol 12 (47) ◽

Author(s):

M. C. R. SYMONS ◽

I. G. SMITH

Keyword(s):

Electron Spin Resonance ◽

Electron Spin ◽

Alkyl Radical ◽

Electron Spin Resonance Study ◽

Alkyl Bromides ◽

Spin Resonance ◽

Spin Resonance Study

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Electron spin resonance study of high field stressing in metal‐oxide‐silicon device oxides

Applied Physics Letters ◽

10.1063/1.97391 ◽

1986 ◽

Vol 49 (19) ◽

pp. 1296-1298 ◽

Cited By ~ 57

Author(s):

W. L. Warren ◽

P. M. Lenahan

Keyword(s):

Electron Spin Resonance ◽

Metal Oxide ◽

Electron Spin ◽

High Field ◽

Electron Spin Resonance Study ◽

Spin Resonance ◽

Metal Oxide Silicon ◽

Silicon Device ◽

Spin Resonance Study

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Formation of semiquinone radicals by electron transfer from or to photoexcited Ru(bpy)32+: an electron spin resonance study

Journal of Photochemistry ◽

10.1016/0047-2670(87)80018-7 ◽

1987 ◽

Vol 36 (3) ◽

pp. 267-278 ◽

Cited By ~ 5

Author(s):

D. Plancherel ◽

J.G. Vos ◽

A. von Zelewsky

Keyword(s):

Electron Transfer ◽

Electron Spin Resonance ◽

Electron Spin ◽

Electron Spin Resonance Study ◽

Semiquinone Radicals ◽

Spin Resonance ◽

Spin Resonance Study

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Spin dynamics in theS=12antiferromagnetic chain compoundsδ−(EDT-TTF-CONMe2)2X(X=AsF6,Br): A multifrequency electron spin resonance study

Physical Review B ◽

10.1103/physrevb.81.224438 ◽

2010 ◽

Vol 81 (22) ◽

Cited By ~ 16

Author(s):

Bálint Náfrádi ◽

Areta Olariu ◽

László Forró ◽

Cécile Mézière ◽

Patrick Batail ◽

...

Keyword(s):

Electron Spin Resonance ◽

Electron Spin ◽

Spin Dynamics ◽

Electron Spin Resonance Study ◽

Spin Resonance ◽

Spin Resonance Study

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The Impact of Oxidative Stress Levels on the Clinical Effectiveness of Sivelestat in Treating Acute Lung Injury: An Electron Spin Resonance Study

Journal of Trauma and Acute Care Surgery ◽

10.1097/ta.0b013e3181bb80d4 ◽

2010 ◽

pp. 1

Author(s):

Shigekiyo Matsumoto ◽

Chihiro Shingu ◽

Hironori Koga ◽

Seigo Hidaka ◽

Koji Goto ◽

...

Keyword(s):

Oxidative Stress ◽

Acute Lung Injury ◽

Electron Spin Resonance ◽

Lung Injury ◽

Electron Spin ◽

Clinical Effectiveness ◽

Electron Spin Resonance Study ◽

Spin Resonance ◽

The Impact ◽

Spin Resonance Study

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