Anomalous oxidation rate of silicon implanted with very high doses of arsenic
1981 ◽
Vol 45
(01)
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pp. 038-042
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Keyword(s):
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2009 ◽
Vol 325
(1)
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pp. 43-48
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2019 ◽
Vol 20
(12)
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pp. 2901
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1992 ◽
Vol 7
(7)
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pp. 653-654
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