Exact analytical solution to diffusion equation for ion‐implanted dopant profile evolution during annealing
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1992 ◽
Vol 33
(6)
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pp. 2329-2335
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2013 ◽
Vol 26
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pp. 315-317
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1989 ◽
Vol 91
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pp. 4658-4663
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2019 ◽
Vol 7
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pp. 1319-1322
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2011 ◽
Vol 16
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pp. 3981-3989
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