Transmission electron microscopy of aluminum implanted and annealed (100) Si: Direct evidence of aluminum precipitate formation
2014 ◽
Vol 248
◽
pp. 1201-1210
◽
2010 ◽
Vol 434-435
◽
pp. 169-172
◽
1980 ◽
Vol 127
(12)
◽
pp. 2722-2728
◽
1980 ◽
Vol 41
(2)
◽
pp. 145-156
◽
2002 ◽
Vol 17
(4)
◽
pp. 784-789
◽
1997 ◽
Vol 41
(3)
◽
pp. 717-719
◽