Ion and radical contributions to hydrogenated amorphous silicon film formation in a dc toroidal discharge

H. Sugai; H. Toyoda; A. Yoshida; T. Okuda

doi:10.1063/1.95754

Ion and radical contributions to hydrogenated amorphous silicon film formation in a dc toroidal discharge

Applied Physics Letters ◽

10.1063/1.95754 ◽

1985 ◽

Vol 46 (11) ◽

pp. 1048-1050 ◽

Cited By ~ 5

Author(s):

H. Sugai ◽

H. Toyoda ◽

A. Yoshida ◽

T. Okuda

Keyword(s):

Amorphous Silicon ◽

Film Formation ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Film ◽

Hydrogenated Amorphous

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Contributions of Silicon-Hydride Radicals to Hydrogenated Amorphous Silicon Film Formation in Windowless Photochemical Vapor Deposition System

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.950 ◽

1994 ◽

Vol 33 (Part 1, No. 2) ◽

pp. 950-955 ◽

Cited By ~ 1

Author(s):

Yoshinori Sawado ◽

Takeshi Akiyama ◽

Tomo Ueno ◽

Koichi Kamisako ◽

Koichi Kuroiwa ◽

...

Keyword(s):

Amorphous Silicon ◽

Vapor Deposition ◽

Film Formation ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Silicon Hydride ◽

Amorphous Silicon Film ◽

Photochemical Vapor Deposition ◽

Hydrogenated Amorphous

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3P-178 IRRAS Analysis on Composite Film of Dimyristoyl-Phosphatidylcoline and Bacteriorhodopsin on hydrogenated amorphous silicon film(Biol & Artifi memb.:Structure & Property,The 47th Annual Meeting of the Biophysical Society of Japan)

Seibutsu Butsuri ◽

10.2142/biophys.49.s181_4 ◽

2009 ◽

Vol 49 (supplement) ◽

pp. S181

Author(s):

Yutaka Tsujiuchi ◽

Hiroshi Masumoto ◽

Takashi Goto

Keyword(s):

Composite Film ◽

Amorphous Silicon ◽

Annual Meeting ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Structure Property ◽

Amorphous Silicon Film ◽

Biophysical Society ◽

Hydrogenated Amorphous

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Measurement of SiH2Densities in an RF-Discharge Silane Plasmae Used in the Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.2588 ◽

1992 ◽

Vol 31 (Part 1, No. 8) ◽

pp. 2588-2591 ◽

Cited By ~ 36

Author(s):

Kunihide Tachibana ◽

Tatsuru Shirafuji ◽

Yasuji Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Rf Discharge ◽

Amorphous Silicon Film ◽

Hydrogenated Amorphous

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Study on the mechanism of rapid solid-phase recrystallization of hydrogenated amorphous silicon film by rapid thermal processing

Thin Solid Films ◽

10.1016/j.tsf.2010.02.032 ◽

2010 ◽

Vol 518 (15) ◽

pp. 4473-4476 ◽

Cited By ~ 2

Author(s):

Xiaoyong Gao ◽

Hongliang Feng ◽

Qinggeng Lin ◽

Liwei Zhang ◽

Xuwei Liu ◽

...

Keyword(s):

Amorphous Silicon ◽

Thermal Processing ◽

Solid Phase ◽

Silicon Film ◽

Rapid Thermal Processing ◽

Hydrogenated Amorphous Silicon ◽

Phase Recrystallization ◽

Amorphous Silicon Film ◽

Hydrogenated Amorphous

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3P247 Interfacial ion conductivity between acidic or neutral gels containing amino acid, and hydrogenated amorphous silicon film(Biol & Artifi memb.: Transport,The 48th Annual Meeting of the Biophysical Society of Japan)

Seibutsu Butsuri ◽

10.2142/biophys.50.s188_5 ◽

2010 ◽

Vol 50 (supplement2) ◽

pp. S188

Author(s):

Takaaki Ichikawa ◽

Takuya Takahashi ◽

Hiroshi Masumoto ◽

Takashi Goto ◽

Yutaka Tsujiuchi

Keyword(s):

Amino Acid ◽

Amorphous Silicon ◽

Annual Meeting ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Ion Conductivity ◽

Amorphous Silicon Film ◽

Biophysical Society ◽

Hydrogenated Amorphous

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3P223 Electric field effect on retinoid molecule film on hydrogenated amorphous silicon film(Biol & Artifi memb.: Structure & Property,The 48th Annual Meeting of the Biophysical Society of Japan)

Seibutsu Butsuri ◽

10.2142/biophys.50.s184_4 ◽

2010 ◽

Vol 50 (supplement2) ◽

pp. S184

Author(s):

Takuya Takahashi ◽

Hiroshi Masumoto ◽

Takashi Goto ◽

Yutaka Tsujiuchi

Keyword(s):

Electric Field ◽

Amorphous Silicon ◽

Field Effect ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Electric Field Effect ◽

Structure Property ◽

Amorphous Silicon Film ◽

Biophysical Society ◽

Hydrogenated Amorphous

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Crystallization of hydrogenated amorphous silicon film and its fractal structure

Vacuum ◽

10.1016/0042-207x(91)91263-n ◽

1991 ◽

Vol 42 (16) ◽

pp. 1039

Author(s):

Lin Hongyi ◽

Yang Daoming ◽

Li Yingxue

Keyword(s):

Amorphous Silicon ◽

Fractal Structure ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Film ◽

Hydrogenated Amorphous

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A highly stabilized hydrogenated amorphous silicon film having very low hydrogen concentration and an improved Si bond network

Journal of Applied Physics ◽

10.1063/1.1846132 ◽

2005 ◽

Vol 97 (3) ◽

pp. 033522 ◽

Cited By ~ 47

Author(s):

Satoshi Shimizu ◽

Michio Kondo ◽

Akihisa Matsuda

Keyword(s):

Amorphous Silicon ◽

Hydrogen Concentration ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Film ◽

Bond Network ◽

Hydrogenated Amorphous

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Passivation quality and electrical characteristics for boron doped hydrogenated amorphous silicon film

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919798 ◽

2017 ◽

Author(s):

Ching-Lin Tseng ◽

Yu-Lin Hsieh ◽

Chien-Chieh Lee ◽

Hsiang-Chih Yu ◽

Tomi T. Li

Keyword(s):

Amorphous Silicon ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Electrical Characteristics ◽

Amorphous Silicon Film ◽

Boron Doped ◽

Hydrogenated Amorphous

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Pyrolytic transformation from polydihydrosilane to hydrogenated amorphous silicon film

Thin Solid Films ◽

10.1016/j.tsf.2012.07.028 ◽

2012 ◽

Vol 520 (21) ◽

pp. 6603-6607 ◽

Cited By ~ 41

Author(s):

Takashi Masuda ◽

Yasuo Matsuki ◽

Tatsuya Shimoda

Keyword(s):

Amorphous Silicon ◽

Silicon Film ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Film ◽

Hydrogenated Amorphous

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