Detection of SiH2in silane and disilane glow discharges by frequency modulation absorption spectroscopy

1984 ◽  
Vol 44 (12) ◽  
pp. 1155-1157 ◽  
Author(s):  
J. M. Jasinski ◽  
E. A. Whittaker ◽  
G. C. Bjorklund ◽  
R. W. Dreyfus ◽  
R. D. Estes ◽  
...  
Keyword(s):  
Absorption Spectroscopy ◽  
Frequency Modulation ◽  
Glow Discharges

Direct observation of SiH2 in glow discharges by frequency-modulation absorption spectroscopy

1984 ◽  
Author(s):  
J. M. Jasinski ◽  
R. W. Dreyfus ◽  
R. D. Estes ◽  
R. E. Walkup ◽  
E. A. Whittaker ◽  
...  
Keyword(s):  
Absorption Spectroscopy ◽  
Direct Observation ◽  
Frequency Modulation ◽  
Glow Discharges

scholarly journals Diagnostics and modeling of glow discharges by time-resolved IR absorption spectroscopy

Vacuum ◽  
2002 ◽  
Vol 64 (3-4) ◽  
pp. 457-465 ◽  
Author(s):  
I. Tanarro ◽  
T. de los Arcos ◽  
C. Domingo ◽  
V.J. Herrero ◽  
M.M. Sanz
Keyword(s):  
Absorption Spectroscopy ◽  
Ir Absorption ◽  
Time Resolved ◽  
Glow Discharges
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