Noncontact surface temperature measurement during reactive‐ion etching using fluorescent polymer films

Paul Kolodner; A. Katzir; Neal Hartsough

doi:10.1063/1.94049

Noncontact surface temperature measurement during reactive‐ion etching using fluorescent polymer films

Applied Physics Letters ◽

10.1063/1.94049 ◽

1983 ◽

Vol 42 (8) ◽

pp. 749-751 ◽

Cited By ~ 21

Author(s):

Paul Kolodner ◽

A. Katzir ◽

Neal Hartsough

Keyword(s):

Surface Temperature ◽

Temperature Measurement ◽

Polymer Films ◽

Reactive Ion Etching ◽

Ion Etching ◽

Surface Temperature Measurement ◽

Fluorescent Polymer

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End-point detection and etch-rate measurement during reactive-ion etching using fluorescent polymer films

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.582635 ◽

1983 ◽

Vol 1 (2) ◽

pp. 501 ◽

Cited By ~ 3

Author(s):

Paul Kolodner

Keyword(s):

Polymer Films ◽

Etch Rate ◽

Reactive Ion Etching ◽

Rate Measurement ◽

Ion Etching ◽

End Point ◽

End Point Detection ◽

Fluorescent Polymer ◽

Point Detection

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A SIMPLE METHOD OF MEASURING THERMOPHYSICAL PROPERTIES BY STEPWISE HEATING - The Optimum Condition of Surface-Temperature Measurement-

Proceeding of International Heat Transfer Conference 10 ◽

10.1615/ihtc10.3080 ◽

1994 ◽

Author(s):

Nobuhiro Himeno ◽

S. Hinata ◽

Michio Yanadori

Keyword(s):

Optimum Condition ◽

Surface Temperature ◽

Temperature Measurement ◽

Thermophysical Properties ◽

Simple Method ◽

Surface Temperature Measurement ◽

Stepwise Heating

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Surface temperature measurement of semitransparent ceramics at high temperature Comparison between pyrometry at the Christiansen frequency and infrared thermography

Quantitative InfraRed Thermography Journal ◽

10.3166/qirt.4.165-186 ◽

2007 ◽

Vol 4 (2) ◽

pp. 165-186

Author(s):

Robin Lucile ◽

Delmas Agnès ◽

Lanternier Thomas

Keyword(s):

High Temperature ◽

Surface Temperature ◽

Temperature Measurement ◽

Infrared Thermography ◽

Surface Temperature Measurement

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A Simple Method of Measuring Thermophysical Properties of Stepwise Heating. 2nd Report, The Optimum Condition of Surface-Temperature Measurement.

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B ◽

10.1299/kikaib.60.1330 ◽

1994 ◽

Vol 60 (572) ◽

pp. 1330-1336

Author(s):

Nobuhiro Himeno ◽

Shigeru Hinata ◽

Michio Yanadori

Keyword(s):

Optimum Condition ◽

Surface Temperature ◽

Temperature Measurement ◽

Thermophysical Properties ◽

Simple Method ◽

Surface Temperature Measurement ◽

Stepwise Heating

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Surface temperature measurement of acoustic liners in the presence of grazing flow and thermal gradient

Experiments in Fluids ◽

10.1007/s00348-021-03184-w ◽

2021 ◽

Vol 62 (4) ◽

Author(s):

Victor Lafont ◽

Fabien Méry ◽

Philippe Reulet ◽

Frank Simon

Keyword(s):

Surface Temperature ◽

Temperature Measurement ◽

Thermal Gradient ◽

Surface Temperature Measurement ◽

Acoustic Liners ◽

Grazing Flow

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Classification-based emissivity for land surface temperature measurement from space

International Journal of Remote Sensing ◽

10.1080/014311698214497 ◽

1998 ◽

Vol 19 (14) ◽

pp. 2753-2774 ◽

Cited By ~ 425

Author(s):

W. C. Snyder ◽

Z. Wan ◽

Y. Zhang ◽

Y.-Z. Feng

Keyword(s):

Surface Temperature ◽

Temperature Measurement ◽

Land Surface Temperature ◽

Land Surface ◽

Surface Temperature Measurement

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Model Study of the Influence of Ambient Temperature and Installation Types on Surface Temperature Measurement by Using a Fiber Bragg Grating Sensor

Sensors ◽

10.3390/s16070975 ◽

2016 ◽

Vol 16 (7) ◽

pp. 975 ◽

Cited By ~ 11

Author(s):

Yi Liu ◽

Jun Zhang

Keyword(s):

Surface Temperature ◽

Ambient Temperature ◽

Temperature Measurement ◽

Fiber Bragg Grating ◽

Fiber Bragg Grating Sensor ◽

Bragg Grating ◽

Surface Temperature Measurement ◽

Model Study ◽

Bragg Grating Sensor

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METHODS OF SURFACE TEMPERATURE MEASUREMENT FOR THE CASTING BILLET IN THE CONTINUOUS CASTING PROCESS UNDER INDUSTRIAL CONDITIONS

METAL 2019 Conference Proeedings ◽

10.37904/metal.2019.839 ◽

2019 ◽

Author(s):

Katarzyna MIŁKOWSKA-PISZCZEK ◽

Paweł DROŻDŻ ◽

Marcin RYWOTYCKI ◽

Paweł KRAJEWSKI ◽

Piotr PRZEGRAŁEK

Keyword(s):

Continuous Casting ◽

Surface Temperature ◽

Temperature Measurement ◽

Casting Process ◽

Continuous Casting Process ◽

Surface Temperature Measurement

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Some problems related to surface temperature measurement of synchronous generator excitation winding in rotation

Proceedings of 14th International Power Electronics and Motion Control Conference EPE-PEMC 2010 ◽

10.1109/epepemc.2010.5606587 ◽

2010 ◽

Author(s):

Zlatko Hanic ◽

Mario Vrazic ◽

Stjepan Stipetic

Keyword(s):

Surface Temperature ◽

Temperature Measurement ◽

Synchronous Generator ◽

Surface Temperature Measurement ◽

Synchronous Generator Excitation ◽

Excitation Winding

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Land-surface temperature measurement from space: physical principles and inverse modeling

IEEE Transactions on Geoscience and Remote Sensing ◽

10.1109/36.17668 ◽

1989 ◽

Vol 27 (3) ◽

pp. 268-278 ◽

Cited By ~ 125

Author(s):

Wan Zhengming ◽

J. Dozier

Keyword(s):

Surface Temperature ◽

Temperature Measurement ◽

Land Surface Temperature ◽

Inverse Modeling ◽

Land Surface ◽

Surface Temperature Measurement ◽

Physical Principles

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