Impurity redistribution in Bi‐implanted Si after nanosecond and picosecond Nd laser pulse irradiation
2012 ◽
Vol 19
(3)
◽
pp. 259-270
◽
Keyword(s):
2011 ◽
Vol 5
(3)
◽
pp. 431-439
◽
Keyword(s):
2005 ◽
Vol 109
(44)
◽
pp. 20973-20978
◽
Keyword(s):
2011 ◽
Vol 110-116
◽
pp. 823-830
◽
Keyword(s):
2011 ◽
Vol 41
(5)
◽
pp. 453-458
◽