Low defect density amorphous hydrogenated silicon prepared by homogeneous chemical vapor deposition

1982 ◽  
Vol 40 (11) ◽  
pp. 973-975 ◽  
Author(s):  
B. A. Scott ◽  
J. A. Reimer ◽  
R. M. Plecenik ◽  
E. E. Simonyi ◽  
W. Reuter
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Defect Density ◽  
Chemical Vapor ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon ◽  
Homogeneous Chemical

Amorphous Hydrogenated Silicon Films for Solar Cell Application Obtained with 55 kHz Plasma Enhanced Chemical Vapor Deposition

1998 ◽  
Vol 145 (7) ◽  
pp. 2508-2512 ◽  
Author(s):  
B. G. Budaguan ◽  
A. A. Sherchenkov ◽  
D. A. Stryahilev ◽  
A. Y. Sazonov ◽  
A. G. Radosel'sky ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Solar Cell ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Silicon Films ◽  
Solar Cell Application ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon
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