Colorless, transparent,c‐oriented aluminum nitride films grown at low temperature by a modified sputter gun

1981 ◽  
Vol 39 (8) ◽  
pp. 643-645 ◽  
Author(s):  
S. Onishi ◽  
M. Eschwei ◽  
S. Bielaczy ◽  
W‐C. Wang
Keyword(s):  
Low Temperature ◽  
Aluminum Nitride

scholarly journals Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites

PLoS ONE ◽  
2015 ◽  
Vol 10 (7) ◽  
pp. e0133479 ◽  
Author(s):  
Khaled Sayed Elbadawi Ramadan ◽  
Stephane Evoy
Keyword(s):  
Low Temperature ◽  
Aluminum Nitride ◽  
Reactive Sputtering ◽  
Thin Aluminum

Synthesis of Ultrafine Aluminum Nitride Powder by a Low-Temperature Carbothermal Reduction Process

2002 ◽  
Vol 224-226 ◽  
pp. 531-534
Author(s):  
Ming Li Qin ◽  
Xuan Hui Qu ◽  
Jian Ling Lin ◽  
Ping An Xiao ◽  
Bao Jun Zhu
Keyword(s):  
Low Temperature ◽  
Aluminum Nitride ◽  
Carbothermal Reduction ◽  
Reduction Process ◽  
Nitride Powder ◽  
Ultrafine Aluminum

Enabling Low Temperature Aluminum Nitride ALD by Use of a Novel Hydrazine Source

2019 ◽  
Author(s):  
Daniel Alvarez ◽  
Jeffrey J. Spiegelman ◽  
Keisuke Andachi ◽  
Aswin Kondusamy ◽  
Jiyoung Kim
Keyword(s):  
Low Temperature ◽  
Aluminum Nitride
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